Low temperature molding for high space coverage microlens arrays

Kerwin Wang, Karl F. Böhringer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.

Original languageEnglish
Title of host publicationPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Pages1291-1292
Number of pages2
DOIs
Publication statusPublished - 2005 Dec 1
EventPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 - Tokyo, Japan
Duration: 2005 Jul 112005 Jul 15

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume2005

Other

OtherPacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
CountryJapan
CityTokyo
Period05-07-1105-07-15

Fingerprint

Microlenses
Molding
Etching
Lenses
lenses
etching
Plasmas
Substrates
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Wang, K., & Böhringer, K. F. (2005). Low temperature molding for high space coverage microlens arrays. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005 (pp. 1291-1292). [1569726] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2005). https://doi.org/10.1109/CLEOPR.2005.1569726
Wang, Kerwin ; Böhringer, Karl F. / Low temperature molding for high space coverage microlens arrays. Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. 2005. pp. 1291-1292 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
@inproceedings{aaae03c7d413485f8e96c1828eb56d32,
title = "Low temperature molding for high space coverage microlens arrays",
abstract = "This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100{\%} coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.",
author = "Kerwin Wang and B{\"o}hringer, {Karl F.}",
year = "2005",
month = "12",
day = "1",
doi = "10.1109/CLEOPR.2005.1569726",
language = "English",
isbn = "0780392426",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
pages = "1291--1292",
booktitle = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005",

}

Wang, K & Böhringer, KF 2005, Low temperature molding for high space coverage microlens arrays. in Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005., 1569726, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2005, pp. 1291-1292, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005, Tokyo, Japan, 05-07-11. https://doi.org/10.1109/CLEOPR.2005.1569726

Low temperature molding for high space coverage microlens arrays. / Wang, Kerwin; Böhringer, Karl F.

Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. 2005. p. 1291-1292 1569726 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Low temperature molding for high space coverage microlens arrays

AU - Wang, Kerwin

AU - Böhringer, Karl F.

PY - 2005/12/1

Y1 - 2005/12/1

N2 - This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.

AB - This paper presents SF6/O2 plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.

UR - http://www.scopus.com/inward/record.url?scp=33847110334&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847110334&partnerID=8YFLogxK

U2 - 10.1109/CLEOPR.2005.1569726

DO - 10.1109/CLEOPR.2005.1569726

M3 - Conference contribution

AN - SCOPUS:33847110334

SN - 0780392426

SN - 9780780392427

T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

SP - 1291

EP - 1292

BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005

ER -

Wang K, Böhringer KF. Low temperature molding for high space coverage microlens arrays. In Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. 2005. p. 1291-1292. 1569726. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2005.1569726