Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate

Ming-Fei Chen, Wen Tse Hsiao, Yu Sen Ho, Shih Feng Tseng, Yu Pin Chen

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

In this research the laser beam shaper component has been used to obtain top-hat intensity distribution laser beam to perform line scribing and to perform electrode patterning on Indium thin oxide (ITO) thin films deposited on glass and plastic substrate. ITO films were removed with third harmonic Nd:YAG laser processing system. The pulse duration, laser output power, pulse repetition rate and scanning speed parameters of straight line patterning and electrode patterning on different types of substrates were discussed, respectively. The experimental results are measured by optical microscope and scanning electron microscope to evaluate the processing parameters and surface properties of ITO thin films.

Original languageEnglish
Pages (from-to)1072-1078
Number of pages7
JournalThin Solid Films
Volume518
Issue number4
DOIs
Publication statusPublished - 2009 Dec 15

Fingerprint

Indium
Tin oxides
indium oxides
tin oxides
Oxide films
indium
plastics
Plastics
Glass
Thin films
Laser beams
Lasers
glass
Substrates
thin films
laser beams
lasers
Scanning
Pulse repetition rate
Electrodes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Chen, Ming-Fei ; Hsiao, Wen Tse ; Ho, Yu Sen ; Tseng, Shih Feng ; Chen, Yu Pin. / Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate. In: Thin Solid Films. 2009 ; Vol. 518, No. 4. pp. 1072-1078.
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Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate. / Chen, Ming-Fei; Hsiao, Wen Tse; Ho, Yu Sen; Tseng, Shih Feng; Chen, Yu Pin.

In: Thin Solid Films, Vol. 518, No. 4, 15.12.2009, p. 1072-1078.

Research output: Contribution to journalArticle

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