Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate

Ming Fei Chen, Wen Tse Hsiao, Yu Sen Ho, Shih Feng Tseng, Yu Pin Chen

Research output: Contribution to journalArticle

24 Citations (Scopus)


In this research the laser beam shaper component has been used to obtain top-hat intensity distribution laser beam to perform line scribing and to perform electrode patterning on Indium thin oxide (ITO) thin films deposited on glass and plastic substrate. ITO films were removed with third harmonic Nd:YAG laser processing system. The pulse duration, laser output power, pulse repetition rate and scanning speed parameters of straight line patterning and electrode patterning on different types of substrates were discussed, respectively. The experimental results are measured by optical microscope and scanning electron microscope to evaluate the processing parameters and surface properties of ITO thin films.

Original languageEnglish
Pages (from-to)1072-1078
Number of pages7
JournalThin Solid Films
Issue number4
Publication statusPublished - 2009 Dec 15


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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