Investigation on the optimized design of alternate-hole-defect for 2D phononic crystal based silicon microresonators

Nan Wang, Fu Li Hsiao, J. M. Tsai, Moorthi Palaniapan, Dim Lee Kwong, Chengkuo Lee

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper shows the design, fabrication, and characterization of the Bloch-mode micromechanical resonators made by creating alternate defects to form a resonant cavity on a two-dimensional silicon phononic crystal slab of square lattice. The length of the resonant cavity (L) and the central-hole radius (r′) are varied to optimize the performance of the resonators. CMOS-compatible aluminium nitride is used as the piezoelectric material of the interdigital transducer to launch and detect acoustic waves. The extent of energy confinement within the cavity, as shown by the simulated displacement profiles of the resonators, agrees with the measured Q factors. We also quantitatively analysed the band structure of the proposed resonators and found that the Q factors are generally in an inverse relationship with the standard deviation of the band, due to the slow sound effect brought by flat bands which reduces the energy loss along the lateral direction (Y direction) and enhances the Q factor.

Original languageEnglish
Article number024910
JournalJournal of Applied Physics
Volume112
Issue number2
DOIs
Publication statusPublished - 2012 Jul 15

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resonators
Q factors
defects
silicon
cavity resonators
crystals
interdigital transducers
acoustics
aluminum nitrides
standard deviation
CMOS
slabs
energy dissipation
cavities
fabrication
radii
profiles
energy

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Wang, Nan ; Hsiao, Fu Li ; Tsai, J. M. ; Palaniapan, Moorthi ; Kwong, Dim Lee ; Lee, Chengkuo. / Investigation on the optimized design of alternate-hole-defect for 2D phononic crystal based silicon microresonators. In: Journal of Applied Physics. 2012 ; Vol. 112, No. 2.
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Investigation on the optimized design of alternate-hole-defect for 2D phononic crystal based silicon microresonators. / Wang, Nan; Hsiao, Fu Li; Tsai, J. M.; Palaniapan, Moorthi; Kwong, Dim Lee; Lee, Chengkuo.

In: Journal of Applied Physics, Vol. 112, No. 2, 024910, 15.07.2012.

Research output: Contribution to journalArticle

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