Abstract
The optimal design of microwave microelectromechanical-system (MEMS) switches by the Taguchi method is presented. The structures of the switches are analyzed and optimized in terms of the effective stiffness constant, the maximum von Mises stress, and the natural frequency in order to improve the reliability and the performance of the MEMS switches. There are four factors, each of which has three levels in the Taguchi method for the MEMS switches. An L 9(34) orthogonal array is used for the matrix experiments. The characteristics of the experiments are studied by the finite-element method and the analytical method. The responses of the signal-to-noise (S/N) ratios of the characteristics of the switches are investigated. The statistical analysis of variance (ANPVA) is used to interpret the experimental results and decide the significant factors. The final optimum setting, A1B 3C1D2, predicts that the effective stiffness constant is 1.06N/m, the maximum von Mises stress is 76.9MPa, and the natural frequency is 29.331 kHz. The corresponding switching time is 34μs, and the pull-down voltage is 9.8V.
| Original language | English |
|---|---|
| Pages (from-to) | 6539-6545 |
| Number of pages | 7 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 46 |
| Issue number | 10 A |
| DOIs | |
| Publication status | Published - 2007 Oct 9 |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)