Investigation of degradation for ohmic performance of oxidized Au/Ni/Mg-doped GaN

Yow-Jon Lin, Zhen Dao Li, Chou Wei Hsu, Feng Tso Chien, Ching Ting Lee, Sheng Tien Shao, Hsing Cheng Chang

Research output: Contribution to journal › Article

16 Citations (Scopus)

Abstract

The degradation of ohmic performance of oxidized Au/Ni/Mg-doped GaN was investigated. Cserveny's concept was applied in the investigation and x-ray photoelectron spectroscopy was performed. It was found that an increase of hole concentration of NiOx would lead to the increasing barrier height and the increasing specific contact resistance of oxidized Au/Ni/Mg-doped GaN.

Original languageEnglish
Pages (from-to)2817-2819
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number17
DOIs
Publication statusPublished - 2003 Apr 28

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degradation
contact resistance
x ray spectroscopy
photoelectron spectroscopy

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Lin, Y-J., Li, Z. D., Hsu, C. W., Chien, F. T., Lee, C. T., Shao, S. T., & Chang, H. C. (2003). Investigation of degradation for ohmic performance of oxidized Au/Ni/Mg-doped GaN. Applied Physics Letters, 82(17), 2817-2819. https://doi.org/10.1063/1.1569991
Lin, Yow-Jon ; Li, Zhen Dao ; Hsu, Chou Wei ; Chien, Feng Tso ; Lee, Ching Ting ; Shao, Sheng Tien ; Chang, Hsing Cheng. / Investigation of degradation for ohmic performance of oxidized Au/Ni/Mg-doped GaN. In: Applied Physics Letters. 2003 ; Vol. 82, No. 17. pp. 2817-2819.
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Lin, Y-J, Li, ZD, Hsu, CW, Chien, FT, Lee, CT, Shao, ST & Chang, HC 2003, 'Investigation of degradation for ohmic performance of oxidized Au/Ni/Mg-doped GaN', Applied Physics Letters, vol. 82, no. 17, pp. 2817-2819. https://doi.org/10.1063/1.1569991

Investigation of degradation for ohmic performance of oxidized Au/Ni/Mg-doped GaN. / Lin, Yow-Jon; Li, Zhen Dao; Hsu, Chou Wei; Chien, Feng Tso; Lee, Ching Ting; Shao, Sheng Tien; Chang, Hsing Cheng.

In: Applied Physics Letters, Vol. 82, No. 17, 28.04.2003, p. 2817-2819.

Research output: Contribution to journal › Article

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Lin Y-J, Li ZD, Hsu CW, Chien FT, Lee CT, Shao ST et al. Investigation of degradation for ohmic performance of oxidized Au/Ni/Mg-doped GaN. Applied Physics Letters. 2003 Apr 28;82(17):2817-2819. https://doi.org/10.1063/1.1569991

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