Influence of membranes on RF microelectromechanical system switches

Yeong L. Lai, Yueh Hung Chen

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

In this paper, the influence of the holes in the membrane structures of radio-frequency (RF) microelectromechanical system (MEMS) switches is studied. We use the finite element method to analyze the effect of the holes in the membranes on the mechanical characteristics of the RF MEMS switches. The characteristics of the switches, including stress, natural frequency, and switching speed, are investigated. The holes in the membranes reduce the stress characteristics of the switches. The switches with the holes in the membranes have higher natural frequency characteristics than those with no holes.

Original languageEnglish
Pages (from-to)255-260
Number of pages6
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Volume27
Issue number2
Publication statusPublished - 2006 Apr 1

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

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