In this paper, the influence of the holes in the membrane structures of radio-frequency (RF) microelectromechanical system (MEMS) switches is studied. We use the finite element method to analyze the effect of the holes in the membranes on the mechanical characteristics of the RF MEMS switches. The characteristics of the switches, including stress, natural frequency, and switching speed, are investigated. The holes in the membranes reduce the stress characteristics of the switches. The switches with the holes in the membranes have higher natural frequency characteristics than those with no holes.
|Number of pages||6|
|Journal||Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao|
|Publication status||Published - 2006 Apr 1|
All Science Journal Classification (ASJC) codes