In situ monitoring of silicon membrane thickness during wet etching using a surface acoustic wave sensor

Chi Yuan Lee, Ying Chou Cheng, Yung Yu Chen, Pei Zen Chang, Tsung Tsong Wu, Ping Hei Chen, Wen Jong Chen, Shih Yung Pao

Research output: Contribution to journalArticle

2 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy