Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate

Chia Hua Chan, Chia Hung Hou, Shao Ze Tseng, Tsing Jen Chen, Hung Ta Chien, Fu Li Hsiao, Chien Chieh Lee, Yen Ling Tsai, Chii Chang Chen

Research output: Contribution to journalArticle

57 Citations (Scopus)

Abstract

This letter describes the improved output power of GaN-based light-emitting diodes (LEDs) formed on a nanopatterned sapphire substrate (NPSS) prepared through etching with a self-assembled monolayer of 750-nm-diameter SiO 2 nanospheres used as the mask. The output power of NPSS LEDs was 76% greater than that of LEDs on a flat sapphire substrate. Three-dimensional finite-difference time-domain calculation predicted a 40% enhancement in light extraction efficiency of NPSS LEDs. In addition, the reduction of full widths at half maximum in the ω -scan rocking curves for the (0 0 2) and (1 0 2) planes of GaN on NPSS suggested improved crystal quality.

Original languageEnglish
Article number011110
JournalApplied Physics Letters
Volume95
Issue number1
DOIs
Publication statusPublished - 2009 Jul 20

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sapphire
light emitting diodes
output
masks
etching
augmentation
curves
crystals

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Chan, Chia Hua ; Hou, Chia Hung ; Tseng, Shao Ze ; Chen, Tsing Jen ; Chien, Hung Ta ; Hsiao, Fu Li ; Lee, Chien Chieh ; Tsai, Yen Ling ; Chen, Chii Chang. / Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate. In: Applied Physics Letters. 2009 ; Vol. 95, No. 1.
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Chan, CH, Hou, CH, Tseng, SZ, Chen, TJ, Chien, HT, Hsiao, FL, Lee, CC, Tsai, YL & Chen, CC 2009, 'Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate', Applied Physics Letters, vol. 95, no. 1, 011110. https://doi.org/10.1063/1.3173817

Improved output power of GaN-based light-emitting diodes grown on a nanopatterned sapphire substrate. / Chan, Chia Hua; Hou, Chia Hung; Tseng, Shao Ze; Chen, Tsing Jen; Chien, Hung Ta; Hsiao, Fu Li; Lee, Chien Chieh; Tsai, Yen Ling; Chen, Chii Chang.

In: Applied Physics Letters, Vol. 95, No. 1, 011110, 20.07.2009.

Research output: Contribution to journalArticle

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AU - Chien, Hung Ta

AU - Hsiao, Fu Li

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AU - Tsai, Yen Ling

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