@inproceedings{7e8f990a693147c099c1f331e69499f0,
title = "Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system",
abstract = "This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.",
author = "K. Wang and B{\"o}hringer, {K. F.} and M. Sinclair and G. Starkweather",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/SENSOR.2003.1215381",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "572--575",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
address = "United States",
note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
}