Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system

K. Wang; K. F. Böhringer; M. Sinclair; G. Starkweather

doi:10.1109/SENSOR.2003.1215381

Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system

K. Wang, K. F. Böhringer, M. Sinclair, G. Starkweather

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	572-575
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1215381
Publication status	Published - 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	1

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country	United States
City	Boston
Period	03-06-08 → 03-06-12

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1215381

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Wang, K., Böhringer, K. F., Sinclair, M., & Starkweather, G. (2003). Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 572-575). [1215381] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215381

Wang, K. ; Böhringer, K. F. ; Sinclair, M. ; Starkweather, G. / Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 572-575 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

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title = "Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system",

abstract = "This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.",

author = "K. Wang and B{\"o}hringer, {K. F.} and M. Sinclair and G. Starkweather",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE. Copyright: Copyright 2015 Elsevier B.V., All rights reserved.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

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doi = "10.1109/SENSOR.2003.1215381",

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Wang, K, Böhringer, KF, Sinclair, M & Starkweather, G 2003, Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1215381, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 1, Institute of Electrical and Electronics Engineers Inc., pp. 572-575, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03-06-08. https://doi.org/10.1109/SENSOR.2003.1215381

Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system. / Wang, K.; Böhringer, K. F.; Sinclair, M.; Starkweather, G.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 572-575 1215381 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AB - This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.

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Wang K, Böhringer KF, Sinclair M, Starkweather G. Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 572-575. 1215381. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). https://doi.org/10.1109/SENSOR.2003.1215381