Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system

K. Wang, K. F. Böhringer, M. Sinclair, G. Starkweather

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages572-575
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03-06-0803-06-12

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Wang, K., Böhringer, K. F., Sinclair, M., & Starkweather, G. (2003). Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 572-575). [1215381] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215381