Abstract
This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.
| Original language | English |
|---|---|
| Title of host publication | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 572-575 |
| Number of pages | 4 |
| ISBN (Electronic) | 0780377311, 9780780377318 |
| DOIs | |
| Publication status | Published - 2003 Jan 1 |
| Event | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12 |
Publication series
| Name | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
|---|---|
| Volume | 1 |
Other
| Other | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers |
|---|---|
| Country | United States |
| City | Boston |
| Period | 03-06-08 → 03-06-12 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
Cite this
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Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system. / Wang, K.; Böhringer, K. F.; Sinclair, M.; Starkweather, G.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 572-575 1215381 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system
AU - Wang, K.
AU - Böhringer, K. F.
AU - Sinclair, M.
AU - Starkweather, G.
PY - 2003/1/1
Y1 - 2003/1/1
N2 - This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.
AB - This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.
UR - http://www.scopus.com/inward/record.url?scp=84944718640&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84944718640&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2003.1215381
DO - 10.1109/SENSOR.2003.1215381
M3 - Conference contribution
AN - SCOPUS:84944718640
T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
SP - 572
EP - 575
BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PB - Institute of Electrical and Electronics Engineers Inc.
ER -