TY - GEN
T1 - Highly space-efficient electrostatic zigzag transmissive micro-optic switches for an integrated MEMS optical display system
AU - Wang, K.
AU - Böhringer, K. F.
AU - Sinclair, M.
AU - Starkweather, G.
N1 - Publisher Copyright:
© 2003 IEEE.
Copyright:
Copyright 2015 Elsevier B.V., All rights reserved.
PY - 2003
Y1 - 2003
N2 - This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.
AB - This paper presents likely the world's smallest electrostatic visible light highly space-efficient transmissive micro-optical switches (TMOS) for an integrated MEMS optical display system. Each TMOS represents one pixel with 150μmx150μm spacing in a display module. It is demonstrated that a zigzag electrostatic actuator of 47μmx160μm size can achieve a maximum static lateral displacement of 10μm at 38 V. Depending on the zigzag actuator design, these devices have a mechanical resonance frequency of up to 18.6 kHz.
UR - http://www.scopus.com/inward/record.url?scp=84944718640&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84944718640&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2003.1215381
DO - 10.1109/SENSOR.2003.1215381
M3 - Conference contribution
AN - SCOPUS:84944718640
T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
SP - 572
EP - 575
BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Y2 - 8 June 2003 through 12 June 2003
ER -