Highly sensitive magnetic-catalytic gas sensor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Magnetic-catalyzed SnO2 with Fe3O4 of CMOS MEMS gas sensor is proposed and it's based on the magnetic-catalytic sensing mechanism to increase sensitivity. Beyond the conventional power dissipation of heating to maintain a certain working temperature, a new approach for gas sensor with magnetic-catalytic mechanism works at the ambient temperature without the consideration of active heating. The design and fabrication is realized by the standard 0.35μm CMOS process to fabricate a gas sensor with mesh stacked electrodes. For the preparation of magnetic sensing material, a prepared solution of sol-gel SnO2 is mixed at SnO2:Fe 3O4 = 3:1, which was deposited onto mesh stacked electrodes. When the CO gas sensor is introduced, the sample is tested and verified inside a CO gas chamber with a magnetic field generator of solenoid coil. We also build a magnetic-catalytic gas reaction behavior description based on Gibbs free energy and the Eyring equation. A careful investigation of measurement results, at horizontal magnetic field, the sensitivity of proposed CO gas sensor reaches 1.73%/ppm under the 12 Gauss which shows widely applicable for an ultra-low power chemical microsensor with high sensitivity.

Original languageEnglish
Title of host publication2013 7th International Conference on Sensing Technology, ICST 2013
Pages419-423
Number of pages5
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 7th International Conference on Sensing Technology, ICST 2013 - Wellington, New Zealand
Duration: 2013 Dec 32013 Dec 5

Publication series

NameProceedings of the International Conference on Sensing Technology, ICST
ISSN (Print)2156-8065
ISSN (Electronic)2156-8073

Other

Other2013 7th International Conference on Sensing Technology, ICST 2013
CountryNew Zealand
CityWellington
Period13-12-0313-12-05

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All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computer Science Applications
  • Signal Processing
  • Electrical and Electronic Engineering

Cite this

Shen, C. H., & Chen, S. J. (2013). Highly sensitive magnetic-catalytic gas sensor. In 2013 7th International Conference on Sensing Technology, ICST 2013 (pp. 419-423). [6727687] (Proceedings of the International Conference on Sensing Technology, ICST). https://doi.org/10.1109/ICSensT.2013.6727687