Abstract
Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.
| Original language | English |
|---|---|
| Title of host publication | 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings |
| Pages | 250-253 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2011 Aug 25 |
| Event | 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Binjiang, Hangzhou, China Duration: 2011 May 10 → 2011 May 12 |
Publication series
| Name | Conference Record - IEEE Instrumentation and Measurement Technology Conference |
|---|---|
| ISSN (Print) | 1091-5281 |
Other
| Other | 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 |
|---|---|
| Country | China |
| City | Binjiang, Hangzhou |
| Period | 11-05-10 → 11-05-12 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
Cite this
}
High positioning accuracy of a dual-axis feeding system enhanced by using error compensation methods for UV laser processing system. / Hsiao, Wen Tse; Tseng, Shih Feng; Chiang, Donyau; Huang, Kuo Cheng; Chen, Ming Fei.
2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings. 2011. p. 250-253 5944028 (Conference Record - IEEE Instrumentation and Measurement Technology Conference).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - High positioning accuracy of a dual-axis feeding system enhanced by using error compensation methods for UV laser processing system
AU - Hsiao, Wen Tse
AU - Tseng, Shih Feng
AU - Chiang, Donyau
AU - Huang, Kuo Cheng
AU - Chen, Ming Fei
PY - 2011/8/25
Y1 - 2011/8/25
N2 - Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.
AB - Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.
UR - http://www.scopus.com/inward/record.url?scp=80051877914&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80051877914&partnerID=8YFLogxK
U2 - 10.1109/IMTC.2011.5944028
DO - 10.1109/IMTC.2011.5944028
M3 - Conference contribution
AN - SCOPUS:80051877914
SN - 9781424479351
T3 - Conference Record - IEEE Instrumentation and Measurement Technology Conference
SP - 250
EP - 253
BT - 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings
ER -