TY - GEN
T1 - High positioning accuracy of a dual-axis feeding system enhanced by using error compensation methods for UV laser processing system
AU - Hsiao, Wen Tse
AU - Tseng, Shih Feng
AU - Chiang, Donyau
AU - Huang, Kuo Cheng
AU - Chen, Ming Fei
PY - 2011/8/25
Y1 - 2011/8/25
N2 - Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.
AB - Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.
UR - http://www.scopus.com/inward/record.url?scp=80051877914&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80051877914&partnerID=8YFLogxK
U2 - 10.1109/IMTC.2011.5944028
DO - 10.1109/IMTC.2011.5944028
M3 - Conference contribution
AN - SCOPUS:80051877914
SN - 9781424479351
T3 - Conference Record - IEEE Instrumentation and Measurement Technology Conference
SP - 250
EP - 253
BT - 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings
T2 - 2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011
Y2 - 10 May 2011 through 12 May 2011
ER -