High positioning accuracy of a dual-axis feeding system enhanced by using error compensation methods for UV laser processing system

Wen Tse Hsiao, Shih Feng Tseng, Donyau Chiang, Kuo Cheng Huang, Ming Fei Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Precision motion stage was an important component for the instrument control system, especially applied in the advanced manufacturing and inspecting systems. This article presented the positioning accuracy of a dual-axis feeding system enhanced by using a laser interferometer for error measurement and compensation. Based on a least-square theorem, one dimensional fitting function was used to compensate dual-axis error values. After the compensation experiments of 1 mm measured interval, the positioning accuracy of X- and Y-axis feeding system increased from 11.5 μm to 5.7 μm and from 26.2 μm to 3.4 μm, respectively. Moreover, the positioning accuracy of X- and Y-axis feeding system with the measured interval of 10 mm increased from 9.9 μm to 5.5 μm and from 24.7 μm to 1.6 μm, respectively. By using this approach, the positioning accuracy was enhanced to 44.4 % and 87 % in X- and Y-axis moving stage, respectively.

Original languageEnglish
Title of host publication2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings
Pages250-253
Number of pages4
DOIs
Publication statusPublished - 2011 Aug 25
Event2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Binjiang, Hangzhou, China
Duration: 2011 May 102011 May 12

Publication series

NameConference Record - IEEE Instrumentation and Measurement Technology Conference
ISSN (Print)1091-5281

Other

Other2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011
CountryChina
CityBinjiang, Hangzhou
Period11-05-1011-05-12

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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