High-angular-sensitivity total-internal-reflection heterodyne interferometry for small displacement measurements

Jiun-You Lin, Xuan Wei Lee, Meng Chang Hsieh, Chia Ou Chang

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This paper proposes an optical method for measuring small displacements using high-angular-sensitivity total-internal-reflection (TIR) heterodyne interferometry. In the designed system, a half-wave plate and a quarter-wave plate that display specific optic-axis azimuths are combined to form a phase shifter. When an isosceles right-angle prism is placed between the phase shifter and an analyzer that displays suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p- polarization states at one TIR. The enhanced phase difference is a function of the prism incident angle, whose variation depends on the displacement of a target; therefore the displacement can be easily and precisely measured by estimating the phase-difference variation. The feasibility of our method was demonstrated with measurement resolution and sensitivity levels superior to 0.025 μm and 4.0°/μm, respectively in a measurement range of 10 μm.

Original languageEnglish
Pages (from-to)163-168
Number of pages6
JournalSensors and Actuators, A: Physical
Volume277
DOIs
Publication statusPublished - 2018 Jul 1

Fingerprint

Displacement measurement
displacement measurement
Phase shifters
Prisms
Interferometry
interferometry
azimuth
prisms
sensitivity
optics
Optics
Sand
rangefinding
Polarization
sands
analyzers
estimating
shift
polarization

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

@article{8733d4721dc74a45a3d56661dc7e4f3c,
title = "High-angular-sensitivity total-internal-reflection heterodyne interferometry for small displacement measurements",
abstract = "This paper proposes an optical method for measuring small displacements using high-angular-sensitivity total-internal-reflection (TIR) heterodyne interferometry. In the designed system, a half-wave plate and a quarter-wave plate that display specific optic-axis azimuths are combined to form a phase shifter. When an isosceles right-angle prism is placed between the phase shifter and an analyzer that displays suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p- polarization states at one TIR. The enhanced phase difference is a function of the prism incident angle, whose variation depends on the displacement of a target; therefore the displacement can be easily and precisely measured by estimating the phase-difference variation. The feasibility of our method was demonstrated with measurement resolution and sensitivity levels superior to 0.025 μm and 4.0°/μm, respectively in a measurement range of 10 μm.",
author = "Jiun-You Lin and Lee, {Xuan Wei} and Hsieh, {Meng Chang} and Chang, {Chia Ou}",
year = "2018",
month = "7",
day = "1",
doi = "10.1016/j.sna.2018.05.012",
language = "English",
volume = "277",
pages = "163--168",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

High-angular-sensitivity total-internal-reflection heterodyne interferometry for small displacement measurements. / Lin, Jiun-You; Lee, Xuan Wei; Hsieh, Meng Chang; Chang, Chia Ou.

In: Sensors and Actuators, A: Physical, Vol. 277, 01.07.2018, p. 163-168.

Research output: Contribution to journalArticle

TY - JOUR

T1 - High-angular-sensitivity total-internal-reflection heterodyne interferometry for small displacement measurements

AU - Lin, Jiun-You

AU - Lee, Xuan Wei

AU - Hsieh, Meng Chang

AU - Chang, Chia Ou

PY - 2018/7/1

Y1 - 2018/7/1

N2 - This paper proposes an optical method for measuring small displacements using high-angular-sensitivity total-internal-reflection (TIR) heterodyne interferometry. In the designed system, a half-wave plate and a quarter-wave plate that display specific optic-axis azimuths are combined to form a phase shifter. When an isosceles right-angle prism is placed between the phase shifter and an analyzer that displays suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p- polarization states at one TIR. The enhanced phase difference is a function of the prism incident angle, whose variation depends on the displacement of a target; therefore the displacement can be easily and precisely measured by estimating the phase-difference variation. The feasibility of our method was demonstrated with measurement resolution and sensitivity levels superior to 0.025 μm and 4.0°/μm, respectively in a measurement range of 10 μm.

AB - This paper proposes an optical method for measuring small displacements using high-angular-sensitivity total-internal-reflection (TIR) heterodyne interferometry. In the designed system, a half-wave plate and a quarter-wave plate that display specific optic-axis azimuths are combined to form a phase shifter. When an isosceles right-angle prism is placed between the phase shifter and an analyzer that displays suitable transmission-axis azimuth, it shifts and enhances the phase difference of the s- and p- polarization states at one TIR. The enhanced phase difference is a function of the prism incident angle, whose variation depends on the displacement of a target; therefore the displacement can be easily and precisely measured by estimating the phase-difference variation. The feasibility of our method was demonstrated with measurement resolution and sensitivity levels superior to 0.025 μm and 4.0°/μm, respectively in a measurement range of 10 μm.

UR - http://www.scopus.com/inward/record.url?scp=85046717834&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85046717834&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2018.05.012

DO - 10.1016/j.sna.2018.05.012

M3 - Article

AN - SCOPUS:85046717834

VL - 277

SP - 163

EP - 168

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

ER -