Abstract
A series of experiments were performed to explore the growth of InN by Molecular Beam Epitaxy (MBE). The growth conditions were optimized based on the study of RHEED during growth and InN dissociation experiments. Characterization of the InN thin films were performed by various techniques such as TEM and XRD.
| Original language | English |
|---|---|
| Pages (from-to) | W3.30.1 - W3.30.6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 595 |
| Publication status | Published - 2000 Jan 1 |
| Event | The 1999 MRS Fall Meeting - Symposium W 'GaN and Related Alloys' - Boston, MA, USA Duration: 1999 Nov 28 → 1999 Dec 3 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
Cite this
}
Growth of InN by MBE. / Chen, W. L.; Gunshor, R. L.; Han, Jung; Higashimine, K.; Otsuka, N.
In: Materials Research Society Symposium - Proceedings, Vol. 595, 01.01.2000, p. W3.30.1 - W3.30.6.Research output: Contribution to journal › Conference article
TY - JOUR
T1 - Growth of InN by MBE
AU - Chen, W. L.
AU - Gunshor, R. L.
AU - Han, Jung
AU - Higashimine, K.
AU - Otsuka, N.
PY - 2000/1/1
Y1 - 2000/1/1
N2 - A series of experiments were performed to explore the growth of InN by Molecular Beam Epitaxy (MBE). The growth conditions were optimized based on the study of RHEED during growth and InN dissociation experiments. Characterization of the InN thin films were performed by various techniques such as TEM and XRD.
AB - A series of experiments were performed to explore the growth of InN by Molecular Beam Epitaxy (MBE). The growth conditions were optimized based on the study of RHEED during growth and InN dissociation experiments. Characterization of the InN thin films were performed by various techniques such as TEM and XRD.
UR - http://www.scopus.com/inward/record.url?scp=17044458549&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=17044458549&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:17044458549
VL - 595
SP - W3.30.1 - W3.30.6
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
SN - 0272-9172
ER -