Growth characteristics and properties of ZnO:Ga thin films prepared by pulsed DC magnetron sputtering

W. T. Yen, Yi-Cheng or Y. C. Lin, P. C. Yao, J. H. Ke, Y. L. Chen

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Transparent conductive ZnO:Ga thin films were deposited on Corning 1737 glass substrate by pulsed direct current (DC) magnetron sputtering. The effects of process parameters, namely pulse frequency and film thickness on the structural and optoelectronic properties of ZnO:Ga thin films are evaluated. It shows that highly c-axis (0 0 2) oriented polycrystalline films with good visible transparency and electrical conductivity were prepared at a pulsed frequency of 10 kHz. Increasing the film thickness also enlarged the grain size and carrier mobility which will subsequently lead to the decrease in resistivity. In summary, ZnO:Ga thin film with the lowest electrical resistivity of 2.01 × 10 -4 Ω cm was obtained at a pulse frequency of 10 kHz with 500 nm in thickness. The surface RMS (root mean square) roughness of the film is 2.9 nm with visible transmittance around 86% and optical band gap of 3.83 eV.

Original languageEnglish
Pages (from-to)3432-3437
Number of pages6
JournalApplied Surface Science
Issue number11
Publication statusPublished - 2010 Mar 15


All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films

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