Growth characteristics and properties of Al-doped ZnO thin films by DC magnetron sputtering from AZOY® target

Pin Chuan Yao, Shih Tse Hang, Menq Jiun Wu

Research output: Contribution to journalArticle

5 Citations (Scopus)


Transparent conducting Al-doped ZnO (AZO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering with a novel sintered ceramic target, AZOY® that contains a small amount of Y2O 3 in addition to Al2O3 and ZnO. The effect of substrate temperature (Ts) on the structural, electrical and optical properties of the prepared AZO films was evaluated extensively. By elevating Ts, both the electrical conductivity and optical transmittance in the Vis/NIR region of the film could be effectively improved. The substrate heating is closely related to the crystallinity and the surface morphology of the deposited films. It is noteworthy that by employing this target material, high quality AZO thin films could be deposited with a simple and cost effective DC magnetron sputtering system.

Original languageEnglish
Pages (from-to)303-312
Number of pages10
JournalTransactions of the Canadian Society for Mechanical Engineering
Issue number3
Publication statusPublished - 2013 Dec 1


All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this