Fiber laser driven EUV generation

Yu Chung Chang, Aghapi Mordovanakis, Kai Chung Hou, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, Almantas Galvanauskas

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

Original languageEnglish
Title of host publication2005 Conference on Lasers and Electro-Optics, CLEO
Pages2200-2202
Number of pages3
Publication statusPublished - 2005 Dec 1
Event2005 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, United States
Duration: 2005 May 22 → 2005 May 27

Publication series

Name2005 Conference on Lasers and Electro-Optics, CLEO
Volume3

Other

Other2005 Conference on Lasers and Electro-Optics, CLEO
CountryUnited States
CityBaltimore, MD
Period05-05-22 → 05-05-27

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Chang, Y. C., Mordovanakis, A., Hou, K. C., Nees, J., Hou, B., Maksimchuk, A., Mourou, G., & Galvanauskas, A. (2005). Fiber laser driven EUV generation. In 2005 Conference on Lasers and Electro-Optics, CLEO (pp. 2200-2202). [CFH6] (2005 Conference on Lasers and Electro-Optics, CLEO; Vol. 3).