TY - GEN
T1 - Fiber laser driven EUV generation
AU - Chang, Yu Chung
AU - Mordovanakis, Aghapi
AU - Hou, Kai Chung
AU - Nees, John
AU - Hou, Bixue
AU - Maksimchuk, Anatoly
AU - Mourou, Gerard
AU - Galvanauskas, Almantas
PY - 2005/12/1
Y1 - 2005/12/1
N2 - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
AB - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
UR - http://www.scopus.com/inward/record.url?scp=30944432388&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=30944432388&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:30944432388
SN - 1557527954
SN - 9781557527950
T3 - 2005 Conference on Lasers and Electro-Optics, CLEO
SP - 2200
EP - 2202
BT - 2005 Conference on Lasers and Electro-Optics, CLEO
T2 - 2005 Conference on Lasers and Electro-Optics, CLEO
Y2 - 22 May 2005 through 27 May 2005
ER -