Fiber laser driven EUV generation

Yu Chung Chang; Aghapi Mordovanakis; Kai Chung Hou; John Nees; Bixue Hou; Anatoly Maksimchuk; Gerard Mourou; Almantas Galvanauskas

Fiber laser driven EUV generation

Yu Chung Chang, Aghapi Mordovanakis, Kai Chung Hou, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, Almantas Galvanauskas

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

Original language	English
Title of host publication	2005 Conference on Lasers and Electro-Optics, CLEO
Pages	2200-2202
Number of pages	3
Publication status	Published - 2005 Dec 1
Event	2005 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, United States Duration: 2005 May 22 → 2005 May 27

Publication series

Name	2005 Conference on Lasers and Electro-Optics, CLEO
Volume	3

Other

Other	2005 Conference on Lasers and Electro-Optics, CLEO
Country	United States
City	Baltimore, MD
Period	05-05-22 → 05-05-27

All Science Journal Classification (ASJC) codes

Engineering(all)

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@inproceedings{79fb67f838a4420b94594d43f2539f22,

title = "Fiber laser driven EUV generation",

abstract = "Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.",

author = "Chang, {Yu Chung} and Aghapi Mordovanakis and Hou, {Kai Chung} and John Nees and Bixue Hou and Anatoly Maksimchuk and Gerard Mourou and Almantas Galvanauskas",

year = "2005",

month = dec,

day = "1",

language = "English",

isbn = "1557527954",

series = "2005 Conference on Lasers and Electro-Optics, CLEO",

pages = "2200--2202",

booktitle = "2005 Conference on Lasers and Electro-Optics, CLEO",

note = "2005 Conference on Lasers and Electro-Optics, CLEO ; Conference date: 22-05-2005 Through 27-05-2005",

}

Fiber laser driven EUV generation. / Chang, Yu Chung; Mordovanakis, Aghapi; Hou, Kai Chung; Nees, John; Hou, Bixue; Maksimchuk, Anatoly; Mourou, Gerard; Galvanauskas, Almantas.

2005 Conference on Lasers and Electro-Optics, CLEO. 2005. p. 2200-2202 CFH6 (2005 Conference on Lasers and Electro-Optics, CLEO; Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fiber laser driven EUV generation

AU - Chang, Yu Chung

AU - Mordovanakis, Aghapi

AU - Hou, Kai Chung

AU - Nees, John

AU - Hou, Bixue

AU - Maksimchuk, Anatoly

AU - Mourou, Gerard

AU - Galvanauskas, Almantas

PY - 2005/12/1

Y1 - 2005/12/1

N2 - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

AB - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

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M3 - Conference contribution

AN - SCOPUS:30944432388

SN - 1557527954

SN - 9781557527950

T3 - 2005 Conference on Lasers and Electro-Optics, CLEO

SP - 2200

EP - 2202

BT - 2005 Conference on Lasers and Electro-Optics, CLEO

T2 - 2005 Conference on Lasers and Electro-Optics, CLEO

Y2 - 22 May 2005 through 27 May 2005

ER -