Abstract
Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
| Original language | English |
|---|---|
| Title of host publication | 2005 Conference on Lasers and Electro-Optics, CLEO |
| Pages | 2200-2202 |
| Number of pages | 3 |
| Publication status | Published - 2005 Dec 1 |
| Event | 2005 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, United States Duration: 2005 May 22 → 2005 May 27 |
Publication series
| Name | 2005 Conference on Lasers and Electro-Optics, CLEO |
|---|---|
| Volume | 3 |
Other
| Other | 2005 Conference on Lasers and Electro-Optics, CLEO |
|---|---|
| Country | United States |
| City | Baltimore, MD |
| Period | 05-05-22 → 05-05-27 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
Chang, Y. C., Mordovanakis, A., Hou, K. C., Nees, J., Hou, B., Maksimchuk, A., Mourou, G., & Galvanauskas, A. (2005). Fiber laser driven EUV generation. In 2005 Conference on Lasers and Electro-Optics, CLEO (pp. 2200-2202). [CFH6] (2005 Conference on Lasers and Electro-Optics, CLEO; Vol. 3).