Fiber laser driven EUV generation

Yu Chung Chang, Aghapi Mordovanakis, Kai Chung Hou, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, Almantas Galvanauskas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2005
PublisherOptical Society of America
ISBN (Print)1557527709, 9781557527707
Publication statusPublished - 2005 Jan 1
EventConference on Lasers and Electro-Optics, CLEO 2005 - Baltimore, MD, United States
Duration: 2005 May 222005 May 22

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2005
CountryUnited States
CityBaltimore, MD
Period05-05-2205-05-22

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Chang, Y. C., Mordovanakis, A., Hou, K. C., Nees, J., Hou, B., Maksimchuk, A., ... Galvanauskas, A. (2005). Fiber laser driven EUV generation. In Conference on Lasers and Electro-Optics, CLEO 2005 (Optics InfoBase Conference Papers). Optical Society of America.