Fiber laser driven EUV generation

Yu Chung Chang, Aghapi Mordovanakis, Kai Chung Hou, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, Almantas Galvanauskas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2005
PublisherOptical Society of America
ISBN (Print)1557527709, 9781557527707
Publication statusPublished - 2005 Jan 1
EventConference on Lasers and Electro-Optics, CLEO 2005 - Baltimore, MD, United States
Duration: 2005 May 222005 May 22

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2005
CountryUnited States
CityBaltimore, MD
Period05-05-2205-05-22

Fingerprint

Extreme ultraviolet lithography
Fiber lasers
fiber lasers
lithography
Laser produced plasmas
Radiation
radiation
Pulsed lasers
laser plasmas
pulsed lasers
scaling

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Chang, Y. C., Mordovanakis, A., Hou, K. C., Nees, J., Hou, B., Maksimchuk, A., ... Galvanauskas, A. (2005). Fiber laser driven EUV generation. In Conference on Lasers and Electro-Optics, CLEO 2005 (Optics InfoBase Conference Papers). Optical Society of America.
Chang, Yu Chung ; Mordovanakis, Aghapi ; Hou, Kai Chung ; Nees, John ; Hou, Bixue ; Maksimchuk, Anatoly ; Mourou, Gerard ; Galvanauskas, Almantas. / Fiber laser driven EUV generation. Conference on Lasers and Electro-Optics, CLEO 2005. Optical Society of America, 2005. (Optics InfoBase Conference Papers).
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title = "Fiber laser driven EUV generation",
abstract = "Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.",
author = "Chang, {Yu Chung} and Aghapi Mordovanakis and Hou, {Kai Chung} and John Nees and Bixue Hou and Anatoly Maksimchuk and Gerard Mourou and Almantas Galvanauskas",
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series = "Optics InfoBase Conference Papers",
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Chang, YC, Mordovanakis, A, Hou, KC, Nees, J, Hou, B, Maksimchuk, A, Mourou, G & Galvanauskas, A 2005, Fiber laser driven EUV generation. in Conference on Lasers and Electro-Optics, CLEO 2005. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics, CLEO 2005, Baltimore, MD, United States, 05-05-22.

Fiber laser driven EUV generation. / Chang, Yu Chung; Mordovanakis, Aghapi; Hou, Kai Chung; Nees, John; Hou, Bixue; Maksimchuk, Anatoly; Mourou, Gerard; Galvanauskas, Almantas.

Conference on Lasers and Electro-Optics, CLEO 2005. Optical Society of America, 2005. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - Fiber laser driven EUV generation

AU - Chang, Yu Chung

AU - Mordovanakis, Aghapi

AU - Hou, Kai Chung

AU - Nees, John

AU - Hou, Bixue

AU - Maksimchuk, Anatoly

AU - Mourou, Gerard

AU - Galvanauskas, Almantas

PY - 2005/1/1

Y1 - 2005/1/1

N2 - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

AB - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

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M3 - Conference contribution

AN - SCOPUS:84899136882

SN - 1557527709

SN - 9781557527707

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics, CLEO 2005

PB - Optical Society of America

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Chang YC, Mordovanakis A, Hou KC, Nees J, Hou B, Maksimchuk A et al. Fiber laser driven EUV generation. In Conference on Lasers and Electro-Optics, CLEO 2005. Optical Society of America. 2005. (Optics InfoBase Conference Papers).