Fiber laser driven EUV generation

Yu Chung Chang, Aghapi Mordovanakis, Kai Chung Hou, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, Almantas Galvanauskas

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2005
PublisherOptical Society of America
ISBN (Print)1557527709, 9781557527707
Publication statusPublished - 2005 Jan 1
EventConference on Lasers and Electro-Optics, CLEO 2005 - Baltimore, MD, United States
Duration: 2005 May 222005 May 22

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2005
CountryUnited States
CityBaltimore, MD
Period05-05-2205-05-22

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Chang, Y. C., Mordovanakis, A., Hou, K. C., Nees, J., Hou, B., Maksimchuk, A., Mourou, G., & Galvanauskas, A. (2005). Fiber laser driven EUV generation. In Conference on Lasers and Electro-Optics, CLEO 2005 (Optics InfoBase Conference Papers). Optical Society of America.