TY - GEN
T1 - Fiber laser driven EUV generation
AU - Chang, Yu Chung
AU - Mordovanakis, Aghapi
AU - Hou, Kai Chung
AU - Nees, John
AU - Hou, Bixue
AU - Maksimchuk, Anatoly
AU - Mourou, Gerard
AU - Galvanauskas, Almantas
PY - 2006/1/1
Y1 - 2006/1/1
N2 - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
AB - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
UR - http://www.scopus.com/inward/record.url?scp=84899075570&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84899075570&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84899075570
SN - 1557528136
SN - 9781557528131
T3 - Optics InfoBase Conference Papers
BT - Conference on Lasers and Electro-Optics, CLEO 2006
PB - Optical Society of America
T2 - Conference on Lasers and Electro-Optics, CLEO 2006
Y2 - 21 May 2006 through 21 May 2006
ER -