Abstract
Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.
| Original language | English |
|---|---|
| Title of host publication | Conference on Lasers and Electro-Optics, CLEO 2006 |
| Publisher | Optical Society of America |
| ISBN (Print) | 1557528136, 9781557528131 |
| Publication status | Published - 2006 Jan 1 |
| Event | Conference on Lasers and Electro-Optics, CLEO 2006 - Long Beach, CA, United States Duration: 2006 May 21 → 2006 May 21 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (Electronic) | 2162-2701 |
Other
| Other | Conference on Lasers and Electro-Optics, CLEO 2006 |
|---|---|
| Country | United States |
| City | Long Beach, CA |
| Period | 06-05-21 → 06-05-21 |
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All Science Journal Classification (ASJC) codes
- Instrumentation
- Atomic and Molecular Physics, and Optics
Cite this
Chang, Y. C., Mordovanakis, A., Hou, K. C., Nees, J., Hou, B., Maksimchuk, A., Mourou, G., & Galvanauskas, A. (2006). Fiber laser driven EUV generation. In Conference on Lasers and Electro-Optics, CLEO 2006 (Optics InfoBase Conference Papers). Optical Society of America.