Fiber laser driven EUV generation

Yu Chung Chang; Aghapi Mordovanakis; Kai Chung Hou; John Nees; Bixue Hou; Anatoly Maksimchuk; Gerard Mourou; Almantas Galvanauskas

Fiber laser driven EUV generation

Yu Chung Chang, Aghapi Mordovanakis, Kai Chung Hou, John Nees, Bixue Hou, Anatoly Maksimchuk, Gerard Mourou, Almantas Galvanauskas

Department of Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics, CLEO 2006
Publisher	Optical Society of America
ISBN (Print)	1557528136, 9781557528131
Publication status	Published - 2006 Jan 1
Event	Conference on Lasers and Electro-Optics, CLEO 2006 - Long Beach, CA, United States Duration: 2006 May 21 → 2006 May 21

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Other

Other	Conference on Lasers and Electro-Optics, CLEO 2006
Country	United States
City	Long Beach, CA
Period	06-05-21 → 06-05-21

All Science Journal Classification (ASJC) codes

Instrumentation
Atomic and Molecular Physics, and Optics

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Cite this

@inproceedings{931a0772915c4410ace4ca2e0512c473,

title = "Fiber laser driven EUV generation",

abstract = "Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.",

author = "Chang, {Yu Chung} and Aghapi Mordovanakis and Hou, {Kai Chung} and John Nees and Bixue Hou and Anatoly Maksimchuk and Gerard Mourou and Almantas Galvanauskas",

year = "2006",

month = jan,

day = "1",

language = "English",

isbn = "1557528136",

series = "Optics InfoBase Conference Papers",

publisher = "Optical Society of America",

booktitle = "Conference on Lasers and Electro-Optics, CLEO 2006",

note = "Conference on Lasers and Electro-Optics, CLEO 2006 ; Conference date: 21-05-2006 Through 21-05-2006",

}

Fiber laser driven EUV generation. / Chang, Yu Chung; Mordovanakis, Aghapi; Hou, Kai Chung; Nees, John; Hou, Bixue; Maksimchuk, Anatoly; Mourou, Gerard; Galvanauskas, Almantas.

Conference on Lasers and Electro-Optics, CLEO 2006. Optical Society of America, 2006. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fiber laser driven EUV generation

AU - Chang, Yu Chung

AU - Mordovanakis, Aghapi

AU - Hou, Kai Chung

AU - Nees, John

AU - Hou, Bixue

AU - Maksimchuk, Anatoly

AU - Mourou, Gerard

AU - Galvanauskas, Almantas

PY - 2006/1/1

Y1 - 2006/1/1

N2 - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

AB - Laser-plasma-produced EUV-radiation has been demonstrated using a pulsed fiber laser. Generated radiation is in the spectral range compatible with 13.5-nm EUV lithography. Fiber lasers can overcome power-scaling limitations of current LPP sources for EUV lithography.

UR - http://www.scopus.com/inward/record.url?scp=84899075570&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84899075570&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84899075570

SN - 1557528136

SN - 9781557528131

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics, CLEO 2006

PB - Optical Society of America

T2 - Conference on Lasers and Electro-Optics, CLEO 2006

Y2 - 21 May 2006 through 21 May 2006

ER -