Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition

Ya Wen Su, Cen Shawn Wu, Chia Chun Chen, Chii Dong Chen

Research output: Contribution to journalArticle

57 Citations (Scopus)

Abstract

A simple, unique and low cost method for fabricating 2D arrays of cadmium selenide pillars is demonstrated. Electrochemical deposition and e-beam lithography techniques are combined in this method. The molar ratio of the electrolytes and the deposition rate are the key factors that determine the quality of the films and its stoichiometry. The technique can be used to make any optical element or any 2 D array pattern.

Original languageEnglish
Pages (from-to)49-51
Number of pages3
JournalAdvanced Materials
Volume15
Issue number1
DOIs
Publication statusPublished - 2003 Jan 3

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Optical devices
Deposition rates
Stoichiometry
Cadmium
Lithography
Electrolytes
Fabrication
Costs
cadmium selenide

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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Fabrication of two-dimensional arrays of CdSe pillars using E-beam lithography and electrochemical deposition. / Su, Ya Wen; Wu, Cen Shawn; Chen, Chia Chun; Chen, Chii Dong.

In: Advanced Materials, Vol. 15, No. 1, 03.01.2003, p. 49-51.

Research output: Contribution to journalArticle

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