Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS growth mechanism

Ming Che Yang, Jiann Shieh, Tsung Shine Ko, Hsuen Li Chen, Tieh Chi Chu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint Dive into the research topics of 'Fabrication of silicon and germanium nanostructures by combination of hydrogen plasma dry etching and VLS growth mechanism'. Together they form a unique fingerprint.

Engineering & Materials Science