Fabrication of photonic crystals for infrared applications

Yeong-Lin Lai, Chi Cheng Chiu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We report on the two-dimensional photonic crystals in polymer membranes for photonic applications in infrared spectra. The photonic crystals with arrays of pores were fabricated by hot embossing lithography. The silicon stamp for embossing was fabricated by an electron cyclotron resonance (ECR) etcher with the etch gases of SF6, O2 and Cl2. The hot embossing process was conducted in a vacuum chamber at a temperature of 90-110 °C which was higher than the glass transition temperature of the polymer. The embossing pressure was controlled at 380 psi and the embossing time was kept at 150 s. The reliable stamp and hot embossing processes realize the infrared photonic crystals.

Original languageEnglish
Pages (from-to)497-499
Number of pages3
JournalColloids and Surfaces A: Physicochemical and Engineering Aspects
Volume313-314
DOIs
Publication statusPublished - 2008 Feb 1

Fingerprint

embossing
Photonic crystals
photonics
Infrared radiation
Fabrication
fabrication
Polymers
crystals
Electron cyclotron resonance
Silicon
Photonics
Lithography
Gases
Vacuum
Membranes
polymers
vacuum chambers
electron cyclotron resonance
glass transition temperature
infrared spectra

All Science Journal Classification (ASJC) codes

  • Colloid and Surface Chemistry

Cite this

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Fabrication of photonic crystals for infrared applications. / Lai, Yeong-Lin; Chiu, Chi Cheng.

In: Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 313-314, 01.02.2008, p. 497-499.

Research output: Contribution to journalArticle

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