Fabrication of free-space MOEM component by CMOS process

This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.