Fabrication of free-space MOEM component by CMOS process

Ying Chou Cheng, Chi Yuan Lee, Ching Liang Dai, Wen-Jong Chen, Pei Zen Chang, Ping Hei Chen

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.

Original languageEnglish
Pages (from-to)73-76
Number of pages4
JournalTamkang Journal of Science and Engineering
Volume7
Issue number2
Publication statusPublished - 2004 Jun 1

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Fabrication
Mirrors
Electrostatic devices
Optical interconnects
Switches
Networks (circuits)

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Cheng, Y. C., Lee, C. Y., Dai, C. L., Chen, W-J., Chang, P. Z., & Chen, P. H. (2004). Fabrication of free-space MOEM component by CMOS process. Tamkang Journal of Science and Engineering, 7(2), 73-76.
Cheng, Ying Chou ; Lee, Chi Yuan ; Dai, Ching Liang ; Chen, Wen-Jong ; Chang, Pei Zen ; Chen, Ping Hei. / Fabrication of free-space MOEM component by CMOS process. In: Tamkang Journal of Science and Engineering. 2004 ; Vol. 7, No. 2. pp. 73-76.
@article{c2df6c60a6e0465899bf8429f78e879f,
title = "Fabrication of free-space MOEM component by CMOS process",
abstract = "This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.",
author = "Cheng, {Ying Chou} and Lee, {Chi Yuan} and Dai, {Ching Liang} and Wen-Jong Chen and Chang, {Pei Zen} and Chen, {Ping Hei}",
year = "2004",
month = "6",
day = "1",
language = "English",
volume = "7",
pages = "73--76",
journal = "Journal of Applied Science and Engineering",
issn = "1560-6686",
publisher = "Tamkang University",
number = "2",

}

Cheng, YC, Lee, CY, Dai, CL, Chen, W-J, Chang, PZ & Chen, PH 2004, 'Fabrication of free-space MOEM component by CMOS process', Tamkang Journal of Science and Engineering, vol. 7, no. 2, pp. 73-76.

Fabrication of free-space MOEM component by CMOS process. / Cheng, Ying Chou; Lee, Chi Yuan; Dai, Ching Liang; Chen, Wen-Jong; Chang, Pei Zen; Chen, Ping Hei.

In: Tamkang Journal of Science and Engineering, Vol. 7, No. 2, 01.06.2004, p. 73-76.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Fabrication of free-space MOEM component by CMOS process

AU - Cheng, Ying Chou

AU - Lee, Chi Yuan

AU - Dai, Ching Liang

AU - Chen, Wen-Jong

AU - Chang, Pei Zen

AU - Chen, Ping Hei

PY - 2004/6/1

Y1 - 2004/6/1

N2 - This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.

AB - This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.

UR - http://www.scopus.com/inward/record.url?scp=2942739180&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2942739180&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:2942739180

VL - 7

SP - 73

EP - 76

JO - Journal of Applied Science and Engineering

JF - Journal of Applied Science and Engineering

SN - 1560-6686

IS - 2

ER -