Abstract
This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.
| Original language | English |
|---|---|
| Pages (from-to) | 73-76 |
| Number of pages | 4 |
| Journal | Tamkang Journal of Science and Engineering |
| Volume | 7 |
| Issue number | 2 |
| Publication status | Published - 2004 Jun 1 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
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Fabrication of free-space MOEM component by CMOS process. / Cheng, Ying Chou; Lee, Chi Yuan; Dai, Ching Liang; Chen, Wen-Jong; Chang, Pei Zen; Chen, Ping Hei.
In: Tamkang Journal of Science and Engineering, Vol. 7, No. 2, 01.06.2004, p. 73-76.Research output: Contribution to journal › Article
TY - JOUR
T1 - Fabrication of free-space MOEM component by CMOS process
AU - Cheng, Ying Chou
AU - Lee, Chi Yuan
AU - Dai, Ching Liang
AU - Chen, Wen-Jong
AU - Chang, Pei Zen
AU - Chen, Ping Hei
PY - 2004/6/1
Y1 - 2004/6/1
N2 - This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.
AB - This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software was utilized to validate the micro-mirror design and elucidate the behavior of the micromirror before fabrication. Also described herein are the general principles of the light-beam switching method, the detailed device design, the post-CMOS fabrication process flow, the result of simulations and preliminary experimental results.
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UR - http://www.scopus.com/inward/citedby.url?scp=2942739180&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:2942739180
VL - 7
SP - 73
EP - 76
JO - Journal of Applied Science and Engineering
JF - Journal of Applied Science and Engineering
SN - 1560-6686
IS - 2
ER -