Abstract
Both the workable micropump and microejector actuated by the shear mode PZT actuators are successfully fabricated. They are based on a similar design and the same process that uses UV-LIGA multilevel electroforming technology. The micropump consists of a vibration plate and a chamber plate while the microejector consists of the same vibration plate and a nozzle plate. The AZ 9260 positive photoresist is used as the electroforming mould. The two alternating steps, the photoresist patterning and nickel electroforming, make components form a quasi 3D (or 2.5D) multilevel microstructure. An over-electroforming technique is employed to form the nozzles in nozzle plate for the microejector. Some useful experimental data about the over-electroforming are proposed to predict and control the orifice diameter. The volume change of the chamber is estimated by both the numerical solution and actual measurement. The liquid ejection of the microejector is observed by a visualization system.
| Original language | English |
|---|---|
| Pages (from-to) | 455-463 |
| Number of pages | 9 |
| Journal | Microsystem Technologies |
| Volume | 13 |
| Issue number | 5-6 |
| DOIs | |
| Publication status | Published - 2007 Mar 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Hardware and Architecture
- Electrical and Electronic Engineering
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Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology. / Chen, S. C.; Cheng, C. H.; Lin, Y. C.
In: Microsystem Technologies, Vol. 13, No. 5-6, 01.03.2007, p. 455-463.Research output: Contribution to journal › Article
TY - JOUR
T1 - Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology
AU - Chen, S. C.
AU - Cheng, C. H.
AU - Lin, Y. C.
PY - 2007/3/1
Y1 - 2007/3/1
N2 - Both the workable micropump and microejector actuated by the shear mode PZT actuators are successfully fabricated. They are based on a similar design and the same process that uses UV-LIGA multilevel electroforming technology. The micropump consists of a vibration plate and a chamber plate while the microejector consists of the same vibration plate and a nozzle plate. The AZ 9260 positive photoresist is used as the electroforming mould. The two alternating steps, the photoresist patterning and nickel electroforming, make components form a quasi 3D (or 2.5D) multilevel microstructure. An over-electroforming technique is employed to form the nozzles in nozzle plate for the microejector. Some useful experimental data about the over-electroforming are proposed to predict and control the orifice diameter. The volume change of the chamber is estimated by both the numerical solution and actual measurement. The liquid ejection of the microejector is observed by a visualization system.
AB - Both the workable micropump and microejector actuated by the shear mode PZT actuators are successfully fabricated. They are based on a similar design and the same process that uses UV-LIGA multilevel electroforming technology. The micropump consists of a vibration plate and a chamber plate while the microejector consists of the same vibration plate and a nozzle plate. The AZ 9260 positive photoresist is used as the electroforming mould. The two alternating steps, the photoresist patterning and nickel electroforming, make components form a quasi 3D (or 2.5D) multilevel microstructure. An over-electroforming technique is employed to form the nozzles in nozzle plate for the microejector. Some useful experimental data about the over-electroforming are proposed to predict and control the orifice diameter. The volume change of the chamber is estimated by both the numerical solution and actual measurement. The liquid ejection of the microejector is observed by a visualization system.
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U2 - 10.1007/s00542-006-0209-9
DO - 10.1007/s00542-006-0209-9
M3 - Article
AN - SCOPUS:33847292301
VL - 13
SP - 455
EP - 463
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 5-6
ER -