Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology

S. C. Chen, C. H. Cheng, Y. C. Lin

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Both the workable micropump and microejector actuated by the shear mode PZT actuators are successfully fabricated. They are based on a similar design and the same process that uses UV-LIGA multilevel electroforming technology. The micropump consists of a vibration plate and a chamber plate while the microejector consists of the same vibration plate and a nozzle plate. The AZ 9260 positive photoresist is used as the electroforming mould. The two alternating steps, the photoresist patterning and nickel electroforming, make components form a quasi 3D (or 2.5D) multilevel microstructure. An over-electroforming technique is employed to form the nozzles in nozzle plate for the microejector. Some useful experimental data about the over-electroforming are proposed to predict and control the orifice diameter. The volume change of the chamber is estimated by both the numerical solution and actual measurement. The liquid ejection of the microejector is observed by a visualization system.

Original languageEnglish
Pages (from-to)455-463
Number of pages9
JournalMicrosystem Technologies
Volume13
Issue number5-6
DOIs
Publication statusPublished - 2007 Mar 1

Fingerprint

Electroforming
electroforming
Fabrication
fabrication
nozzles
Nozzles
Photoresists
photoresists
chambers
vibration
orifices
Orifices
Nickel
ejection
Actuators
Visualization
actuators
nickel
shear
microstructure

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

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Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technology. / Chen, S. C.; Cheng, C. H.; Lin, Y. C.

In: Microsystem Technologies, Vol. 13, No. 5-6, 01.03.2007, p. 455-463.

Research output: Contribution to journalArticle

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