Experimental verification of phononic crystal slab based silicon microresonators

Nan Wang, Min Tang, Fu Li Hsiao, Chong Pei Ho, Moorthi Palaniapan, Dim Lee Kwong, Chengkuo Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports experimentally measured data of two microfabricated resonators, namely a Fabry-Perot (FP) resonator and a reduced central-hole (RCH) resonator, formed by engineering different defects on an otherwise perfect phononic crystal (PnC) slab. Experimental results, which are well supported by the numerically simulated data, show that the RCH resonator has higher Q factor, higher resonant frequency and lower insertion loss than the FP resonator. Finite-element-modelling (FEM) analysed steady-state displacement profiles of the two resonators show that the higher Q factor obtained by the RCH resonator is caused by its superior ability of the energy confinement within the defected region.

Original languageEnglish
Title of host publicationOptical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings
Pages131-132
Number of pages2
DOIs
Publication statusPublished - 2013 Dec 1
Event2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan
Duration: 2013 Aug 182013 Aug 22

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013
CountryJapan
CityKanazawa
Period13-08-1813-08-22

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Wang, N., Tang, M., Hsiao, F. L., Ho, C. P., Palaniapan, M., Kwong, D. L., & Lee, C. (2013). Experimental verification of phononic crystal slab based silicon microresonators. In Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings (pp. 131-132). [6659094] (International Conference on Optical MEMS and Nanophotonics). https://doi.org/10.1109/OMN.2013.6659094