Experimental study for low resistance interline connections using pulsed laser techniques

Kuan Jung Chung, Joseph B. Bernstein, J. I. Luo, J. Ari Tuchman, Zheng K. Ma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original languageEnglish
Title of host publication2005 Quantum Electronics and Laser Science Conference (QELS)
Pages1564-1566
Number of pages3
Publication statusPublished - 2005 Oct 31
Event2005 Quantum Electronics and Laser Science Conference (QELS) - Baltimore, MD, United States
Duration: 2005 May 22 → 2005 May 27

Publication series

NameQuantum Electronics and Laser Science Conference (QELS)
Volume3

Other

Other2005 Quantum Electronics and Laser Science Conference (QELS)
CountryUnited States
CityBaltimore, MD
Period05-05-22 → 05-05-27

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Pulsed lasers

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Chung, K. J., Bernstein, J. B., Luo, J. I., Tuchman, J. A., & Ma, Z. K. (2005). Experimental study for low resistance interline connections using pulsed laser techniques. In 2005 Quantum Electronics and Laser Science Conference (QELS) (pp. 1564-1566). (Quantum Electronics and Laser Science Conference (QELS); Vol. 3).
Chung, Kuan Jung ; Bernstein, Joseph B. ; Luo, J. I. ; Tuchman, J. Ari ; Ma, Zheng K. / Experimental study for low resistance interline connections using pulsed laser techniques. 2005 Quantum Electronics and Laser Science Conference (QELS). 2005. pp. 1564-1566 (Quantum Electronics and Laser Science Conference (QELS)).
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title = "Experimental study for low resistance interline connections using pulsed laser techniques",
author = "Chung, {Kuan Jung} and Bernstein, {Joseph B.} and Luo, {J. I.} and Tuchman, {J. Ari} and Ma, {Zheng K.}",
year = "2005",
month = "10",
day = "31",
language = "English",
isbn = "1557527962",
series = "Quantum Electronics and Laser Science Conference (QELS)",
pages = "1564--1566",
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Chung, KJ, Bernstein, JB, Luo, JI, Tuchman, JA & Ma, ZK 2005, Experimental study for low resistance interline connections using pulsed laser techniques. in 2005 Quantum Electronics and Laser Science Conference (QELS). Quantum Electronics and Laser Science Conference (QELS), vol. 3, pp. 1564-1566, 2005 Quantum Electronics and Laser Science Conference (QELS), Baltimore, MD, United States, 05-05-22.

Experimental study for low resistance interline connections using pulsed laser techniques. / Chung, Kuan Jung; Bernstein, Joseph B.; Luo, J. I.; Tuchman, J. Ari; Ma, Zheng K.

2005 Quantum Electronics and Laser Science Conference (QELS). 2005. p. 1564-1566 (Quantum Electronics and Laser Science Conference (QELS); Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Tuchman, J. Ari

AU - Ma, Zheng K.

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Chung KJ, Bernstein JB, Luo JI, Tuchman JA, Ma ZK. Experimental study for low resistance interline connections using pulsed laser techniques. In 2005 Quantum Electronics and Laser Science Conference (QELS). 2005. p. 1564-1566. (Quantum Electronics and Laser Science Conference (QELS)).

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