Experimental investigation of a cavity-mode resonator using a micromachined two-dimensional silicon phononic crystal in a square lattice

Nan Wang, J. M. Tsai, Fu Li Hsiao, B. W. Soon, Dim Lee Kwong, Moorthi Palaniapan, Chengkuo Lee

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

A 2-D silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10- μm-thick freestanding silicon plate with line defects is characterized as a cavity-mode PnC resonator. A piezoelectric aluminum nitride (AlN) film is employed as the interdigital transducers to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite-element method. The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1000 at its resonant frequency of 152.46 MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for radio-frequency communications and sensing applications.

Original languageEnglish
Article number5763749
Pages (from-to)821-823
Number of pages3
JournalIEEE Electron Device Letters
Volume32
Issue number6
DOIs
Publication statusPublished - 2011 Jun 1

Fingerprint

Crystal resonators
Silicon
Crystal lattices
Resonators
Crystals
Aluminum nitride
Microfabrication
Band structure
Transducers
Natural frequencies
Acoustics
Acoustic waves
Finite element method
Defects
Communication
Air

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

Wang, Nan ; Tsai, J. M. ; Hsiao, Fu Li ; Soon, B. W. ; Kwong, Dim Lee ; Palaniapan, Moorthi ; Lee, Chengkuo. / Experimental investigation of a cavity-mode resonator using a micromachined two-dimensional silicon phononic crystal in a square lattice. In: IEEE Electron Device Letters. 2011 ; Vol. 32, No. 6. pp. 821-823.
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Experimental investigation of a cavity-mode resonator using a micromachined two-dimensional silicon phononic crystal in a square lattice. / Wang, Nan; Tsai, J. M.; Hsiao, Fu Li; Soon, B. W.; Kwong, Dim Lee; Palaniapan, Moorthi; Lee, Chengkuo.

In: IEEE Electron Device Letters, Vol. 32, No. 6, 5763749, 01.06.2011, p. 821-823.

Research output: Contribution to journalArticle

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AU - Wang, Nan

AU - Tsai, J. M.

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AU - Kwong, Dim Lee

AU - Palaniapan, Moorthi

AU - Lee, Chengkuo

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AB - A 2-D silicon phononic crystal (PnC) slab of a square array of cylindrical air holes in a 10- μm-thick freestanding silicon plate with line defects is characterized as a cavity-mode PnC resonator. A piezoelectric aluminum nitride (AlN) film is employed as the interdigital transducers to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS compatible. Both the band structure of the PnC and the transmission spectrum of the proposed PnC resonator are analyzed and optimized using finite-element method. The measured quality factor (Q factor) of the microfabricated PnC resonator is over 1000 at its resonant frequency of 152.46 MHz. The proposed PnC resonator shows promising acoustic resonance characteristics for radio-frequency communications and sensing applications.

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