Abstract
This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab made by etching a square array of cylindrical air holes in a 10m thick free-standing silicon plate. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a PnC structure which has a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators increases with central-hole radius (r') and reaches its maximum value (163.54MHz) at r'=8μm, while Q factor reaches maximum (954) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics with relative smaller PnC active area than other reported designs. Such performance is very promising for sensing applications.
| Original language | English |
|---|---|
| Title of host publication | 2011 Defense Science Research Conference and Expo, DSR 2011 |
| DOIs | |
| Publication status | Published - 2011 Oct 13 |
| Event | 2011 Defense Science Research Conference and Expo, DSR 2011 - Singapore, Singapore Duration: 2011 Aug 3 → 2011 Aug 5 |
Publication series
| Name | 2011 Defense Science Research Conference and Expo, DSR 2011 |
|---|
Other
| Other | 2011 Defense Science Research Conference and Expo, DSR 2011 |
|---|---|
| Country | Singapore |
| City | Singapore |
| Period | 11-08-03 → 11-08-05 |
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All Science Journal Classification (ASJC) codes
- Law
Cite this
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Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate. / Wang, Nan; Tsai, J. M.; Soon, B. W.; Kwong, Dim Lee; Hsiao, Fu Li; Palaniapan, Moorthi; Lee, Chengkuo.
2011 Defense Science Research Conference and Expo, DSR 2011. 2011. 6026876 (2011 Defense Science Research Conference and Expo, DSR 2011).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Experimental demonstration of microfabricated phononic crystal resonators based on two-dimensional silicon plate
AU - Wang, Nan
AU - Tsai, J. M.
AU - Soon, B. W.
AU - Kwong, Dim Lee
AU - Hsiao, Fu Li
AU - Palaniapan, Moorthi
AU - Lee, Chengkuo
PY - 2011/10/13
Y1 - 2011/10/13
N2 - This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab made by etching a square array of cylindrical air holes in a 10m thick free-standing silicon plate. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a PnC structure which has a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators increases with central-hole radius (r') and reaches its maximum value (163.54MHz) at r'=8μm, while Q factor reaches maximum (954) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics with relative smaller PnC active area than other reported designs. Such performance is very promising for sensing applications.
AB - This paper shows the design, fabrication and characterization of a novel design micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab made by etching a square array of cylindrical air holes in a 10m thick free-standing silicon plate. Piezoelectric aluminum nitride (AlN) film is deployed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a PnC structure which has a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators increases with central-hole radius (r') and reaches its maximum value (163.54MHz) at r'=8μm, while Q factor reaches maximum (954) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics with relative smaller PnC active area than other reported designs. Such performance is very promising for sensing applications.
UR - http://www.scopus.com/inward/record.url?scp=80053647261&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80053647261&partnerID=8YFLogxK
U2 - 10.1109/DSR.2011.6026876
DO - 10.1109/DSR.2011.6026876
M3 - Conference contribution
AN - SCOPUS:80053647261
SN - 9781424492763
T3 - 2011 Defense Science Research Conference and Expo, DSR 2011
BT - 2011 Defense Science Research Conference and Expo, DSR 2011
ER -