Experimental demonstration of Fano resonance in microfabricated phononic crystal resonators based on two-dimensional silicon slab

Nan Wang, Fu Li Hsiao, J. M. Tsai, Moorthi Palaniapan, Dim Lee Kwong, Chengkuo Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, we demonstrate the experimental study of Fano resonance in a microfabricated phononic crystal (PnC) resonator by creating defects on a two-dimensional (2-D) silicon PnC slab. Our experimental results show that for this type of PnC resonator, the local resonance mechanism plays a dominant role in the acoustic wave transmission, rather than the non-resonant propagating mechanism.

Original languageEnglish
Title of host publicationProceedings of the 2013 IEEE 5th International Nanoelectronics Conference, INEC 2013
Pages100-102
Number of pages3
DOIs
Publication statusPublished - 2013 Mar 13
Event2013 IEEE 5th International Nanoelectronics Conference, INEC 2013 - Singapore, Singapore
Duration: 2013 Jan 22013 Jan 4

Publication series

NameProceedings - Winter Simulation Conference
ISSN (Print)0891-7736

Other

Other2013 IEEE 5th International Nanoelectronics Conference, INEC 2013
CountrySingapore
CitySingapore
Period13-01-0213-01-04

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All Science Journal Classification (ASJC) codes

  • Software
  • Modelling and Simulation
  • Computer Science Applications

Cite this

Wang, N., Hsiao, F. L., Tsai, J. M., Palaniapan, M., Kwong, D. L., & Lee, C. (2013). Experimental demonstration of Fano resonance in microfabricated phononic crystal resonators based on two-dimensional silicon slab. In Proceedings of the 2013 IEEE 5th International Nanoelectronics Conference, INEC 2013 (pp. 100-102). [6465966] (Proceedings - Winter Simulation Conference). https://doi.org/10.1109/INEC.2013.6465966