Abstract
The 248 nm excimer-laser-induced activation of the Mg-doped GaN layers is discussed. It is found that the dissociation of the Mg-H complexes and the formation of hydrogenated Ga vacancies and/or the Ga vacancies occupied by interstitial Mg led to an increase in the hole concentration during the laser irradiation process. The photoluminescence and x-ray photoelectron spectroscopy measurements are used for the purpose. The results show that the excimer-laser-induced activation is attributed to the dissociation of the Mg-H complexes.
| Original language | English |
|---|---|
| Pages (from-to) | 2515-2517 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 84 |
| Issue number | 14 |
| DOIs | |
| Publication status | Published - 2004 Apr 5 |
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All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)
Cite this
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Excimer-laser-induced activation of Mg-doped GaN layers. / Lin, Yow Jon; Liu, Wen Fung; Lee, Ching Ting.
In: Applied Physics Letters, Vol. 84, No. 14, 05.04.2004, p. 2515-2517.Research output: Contribution to journal › Article
TY - JOUR
T1 - Excimer-laser-induced activation of Mg-doped GaN layers
AU - Lin, Yow Jon
AU - Liu, Wen Fung
AU - Lee, Ching Ting
PY - 2004/4/5
Y1 - 2004/4/5
N2 - The 248 nm excimer-laser-induced activation of the Mg-doped GaN layers is discussed. It is found that the dissociation of the Mg-H complexes and the formation of hydrogenated Ga vacancies and/or the Ga vacancies occupied by interstitial Mg led to an increase in the hole concentration during the laser irradiation process. The photoluminescence and x-ray photoelectron spectroscopy measurements are used for the purpose. The results show that the excimer-laser-induced activation is attributed to the dissociation of the Mg-H complexes.
AB - The 248 nm excimer-laser-induced activation of the Mg-doped GaN layers is discussed. It is found that the dissociation of the Mg-H complexes and the formation of hydrogenated Ga vacancies and/or the Ga vacancies occupied by interstitial Mg led to an increase in the hole concentration during the laser irradiation process. The photoluminescence and x-ray photoelectron spectroscopy measurements are used for the purpose. The results show that the excimer-laser-induced activation is attributed to the dissociation of the Mg-H complexes.
UR - http://www.scopus.com/inward/record.url?scp=2342648075&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=2342648075&partnerID=8YFLogxK
U2 - 10.1063/1.1695436
DO - 10.1063/1.1695436
M3 - Article
AN - SCOPUS:2342648075
VL - 84
SP - 2515
EP - 2517
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 14
ER -