TY - GEN
T1 - Electrode design optimization of a CMOS fringing-field capacitive sensor
AU - Li, Yu Ting
AU - Tzeng, Yen Lin
AU - Chao, Chih Ming
AU - Wang, Kerwin
PY - 2012/6/1
Y1 - 2012/6/1
N2 - The capacitance of a micro-capacitive-sensor is mainly depends on its electrode structures, electrode arrangement and the dielectric strength of its surrounding. This paper presents a novel electrode design to enhance the fringing-field and to increase the capacitance of a CMOS MEMS capacitive sensor. The design optimization process is assisted by COMSOL, a multi-physics finite-element simulation tool. The design goal is to maximize the fringing-field of capacitive sensor. The capacitor has been built with a VLSI Schmitt trigger, and temperature compensator to probe the capacitance. The experiment results show that proposed capacitor can achieve the capacitance to 75.2 pF.
AB - The capacitance of a micro-capacitive-sensor is mainly depends on its electrode structures, electrode arrangement and the dielectric strength of its surrounding. This paper presents a novel electrode design to enhance the fringing-field and to increase the capacitance of a CMOS MEMS capacitive sensor. The design optimization process is assisted by COMSOL, a multi-physics finite-element simulation tool. The design goal is to maximize the fringing-field of capacitive sensor. The capacitor has been built with a VLSI Schmitt trigger, and temperature compensator to probe the capacitance. The experiment results show that proposed capacitor can achieve the capacitance to 75.2 pF.
UR - http://www.scopus.com/inward/record.url?scp=84861553038&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84861553038&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2012.6196848
DO - 10.1109/NEMS.2012.6196848
M3 - Conference contribution
AN - SCOPUS:84861553038
SN - 9781467311243
T3 - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
SP - 603
EP - 606
BT - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
T2 - 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Y2 - 5 March 2012 through 8 March 2012
ER -