Effects of substrate temperature on the microstructure and properties of Al-doped ZnO thin films by DC magnetron sputtering from AZOY® target

Pin Chuan Yao, Shih Tse Hang, Menq Jiun Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Transparent conducting Al-doped ZnO (AZO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering with a sintered ceramic target, AZOY® that contains a small amount of Y2O3 in addition to Al2O3 and ZnO. The effect of substrate temperatures (Ts) on the structural, electrical and optical properties of the prepared AZO films was evaluated extensively. By elevating Ts, the electrical conductivity of the films could be effectively improved from 1.68 ×10-3 Ω{dot operator}cm (no substrates heating) to a minimum resistivity of 4.62×10-4 Ω{dot operator}cm at Ts = 400°C with an average visible transmittance (400~800nm) of ~80%. It revealed that substrate heating is closely related to the crystallinity and the surface roughness of the deposited films. It is noteworthy that the transmittance in the NIR region was also improved considerably as compared to those using alloy targets by reactive magnetron sputtering and even slightly higher than those using Al-doped ZnO (1 wt.%) ceramic targets by RF sputtering.

Original languageEnglish
Title of host publicationInnovation for Applied Science and Technology
Pages108-112
Number of pages5
DOIs
Publication statusPublished - 2013 Feb 20
Event2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012 - Kaohsiung, Taiwan
Duration: 2012 Nov 22012 Nov 6

Publication series

NameApplied Mechanics and Materials
Volume284-287
ISSN (Print)1660-9336
ISSN (Electronic)1662-7482

Other

Other2nd International Conference on Engineering and Technology Innovation 2012, ICETI 2012
CountryTaiwan
CityKaohsiung
Period12-11-0212-11-06

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Yao, P. C., Hang, S. T., & Wu, M. J. (2013). Effects of substrate temperature on the microstructure and properties of Al-doped ZnO thin films by DC magnetron sputtering from AZOY® target. In Innovation for Applied Science and Technology (pp. 108-112). (Applied Mechanics and Materials; Vol. 284-287). https://doi.org/10.4028/www.scientific.net/AMM.284-287.108