Effects of macro- and micro-hole milling parameters on Al2O 3 ceramics using an ultraviolet laser system

W. T. Hsiao, S. F. Tseng, C. K. Chung, K. C. Huang, M. F. Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Ceramics are commonly used as substrates in electrically insulated integrated circuit, printed circuit board, and lightemitting diode industries because of their excellent dielectric and thermal properties. However, brittle materials (e.q., ceramic alumina, sapphire, glass, and silicon wafer) are difficult to fabricate using wheel tools. Laser material processes are preferred over traditional methods because they allow noncontact processing, avoid tool wear problems, and achieve high speed, high accuracy, and high resolution. Laser material processes also exhibit minimal residual thermal effects and residual stress. This study investigated the laser drilling of Al2O 3 ceramic material (with a thickness of 380 μm and hole diameters of 200, 300, and 500 μm, respectively) by using a laser milling method. The macro- and micro-hole milling performance depended on various parameters including the galvanometric scan speed and milling time. A 3D confocal laser scanning microscope and a field-emission scanning electron microscope were used to measure the surface morphology, taper angle, and melted residual height of the machined surface after laser milling. The edge quality and roundness of laser milling were also observed using image-processing edge-detection technology.

Original languageEnglish
Title of host publicationInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
Volume8769
DOIs
Publication statusPublished - 2013 Aug 15
EventInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 - Singapore, Singapore
Duration: 2013 Apr 92013 Apr 11

Other

OtherInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
CountrySingapore
CitySingapore
Period13-04-0913-04-11

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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    Hsiao, W. T., Tseng, S. F., Chung, C. K., Huang, K. C., & Chen, M. F. (2013). Effects of macro- and micro-hole milling parameters on Al2O 3 ceramics using an ultraviolet laser system. In International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 (Vol. 8769). [87693L] https://doi.org/10.1117/12.2018981