Effects of KrF excimer laser irradiation on surface work function of indium-tin-oxide

Yow-Jon Lin, Yao Ming Chen, Yung Chi Wang

Research output: Contribution to journalArticle

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Abstract

In this study, the effects of a KrF excimer laser irradiation on the surface work function (SWF) of indium-tin-oxide (ITO) have been investigated. From the observed x-ray photoelectron spectroscopy results, optical transmittance measurements, and four-point probe measurements, it is suggested that the surface chemical changes, the reduction of the carrier concentration, and an increase in the sheet resistance had strong effects on the SWF of ITO. We find that the (O2) 2- occupation of oxygen vacancies (VO 2+) near the ITO surface after laser irradiation induced a peroxidic ITO surface, increasing the SWF.

Original languageEnglish
Article number083702
JournalJournal of Applied Physics
Volume97
Issue number8
DOIs
Publication statusPublished - 2005 Apr 27

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excimer lasers
indium oxides
tin oxides
irradiation
occupation
x ray spectroscopy
transmittance
photoelectron spectroscopy
probes
oxygen
lasers

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

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abstract = "In this study, the effects of a KrF excimer laser irradiation on the surface work function (SWF) of indium-tin-oxide (ITO) have been investigated. From the observed x-ray photoelectron spectroscopy results, optical transmittance measurements, and four-point probe measurements, it is suggested that the surface chemical changes, the reduction of the carrier concentration, and an increase in the sheet resistance had strong effects on the SWF of ITO. We find that the (O2) 2- occupation of oxygen vacancies (VO 2+) near the ITO surface after laser irradiation induced a peroxidic ITO surface, increasing the SWF.",
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Effects of KrF excimer laser irradiation on surface work function of indium-tin-oxide. / Lin, Yow-Jon; Chen, Yao Ming; Wang, Yung Chi.

In: Journal of Applied Physics, Vol. 97, No. 8, 083702, 27.04.2005.

Research output: Contribution to journalArticle

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