Effects of KrF excimer laser irradiation on surface work function of indium-tin-oxide

Yow Jon Lin, Yao Ming Chen, Yung Chi Wang

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In this study, the effects of a KrF excimer laser irradiation on the surface work function (SWF) of indium-tin-oxide (ITO) have been investigated. From the observed x-ray photoelectron spectroscopy results, optical transmittance measurements, and four-point probe measurements, it is suggested that the surface chemical changes, the reduction of the carrier concentration, and an increase in the sheet resistance had strong effects on the SWF of ITO. We find that the (O2) 2- occupation of oxygen vacancies (VO 2+) near the ITO surface after laser irradiation induced a peroxidic ITO surface, increasing the SWF.

Original languageEnglish
Article number083702
JournalJournal of Applied Physics
Issue number8
Publication statusPublished - 2005 Apr 27


All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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