TY - GEN
T1 - Effect of deposition conditions on the characterization of Cu(In,Ga)Se2 precursor films by sputtering process
AU - Lin, Y. C.
AU - Ke, J. H.
AU - Chen, C. C.
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - In this study, Cu(In,Ga)Se2 (CIGS) thin films were deposited onto bi-layer Mo coated soda-lime glass by sputtering a chalcopyrite CIGS quaternary alloy target. The influence of sputtering power and substrate temperature on the characterization of CIGS precursor films was investigated. Experimental results demonstrate that the CIGS quaternary target has the characteristics of chalcopyrite structures. The samples deposited at a sputter power of 1.5 W/cm2 (both as-deposited and after annealing) exhibited superior uniformity, and the phenomenon of composition loss resulting from annealing was not drastic. The composition distribution of as-deposited film produced at a substrate temperature 373 K approached that of ideal stoichiometry.
AB - In this study, Cu(In,Ga)Se2 (CIGS) thin films were deposited onto bi-layer Mo coated soda-lime glass by sputtering a chalcopyrite CIGS quaternary alloy target. The influence of sputtering power and substrate temperature on the characterization of CIGS precursor films was investigated. Experimental results demonstrate that the CIGS quaternary target has the characteristics of chalcopyrite structures. The samples deposited at a sputter power of 1.5 W/cm2 (both as-deposited and after annealing) exhibited superior uniformity, and the phenomenon of composition loss resulting from annealing was not drastic. The composition distribution of as-deposited film produced at a substrate temperature 373 K approached that of ideal stoichiometry.
UR - http://www.scopus.com/inward/record.url?scp=84867144885&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84867144885&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMM.189.63
DO - 10.4028/www.scientific.net/AMM.189.63
M3 - Conference contribution
AN - SCOPUS:84867144885
SN - 9783037854594
T3 - Applied Mechanics and Materials
SP - 63
EP - 68
BT - Frontier in Information Engineering for Mechanics and Materials
T2 - 2012 International Conference on Information Engineering for Mechanics and Materials, ICIMM 2012
Y2 - 19 May 2012 through 22 May 2012
ER -