Abstract
In this study, Cu(In,Ga)Se2 (CIGS) thin films were deposited onto bi-layer Mo coated soda-lime glass by sputtering a chalcopyrite CIGS quaternary alloy target. The influence of sputtering power and substrate temperature on the characterization of CIGS precursor films was investigated. Experimental results demonstrate that the CIGS quaternary target has the characteristics of chalcopyrite structures. The samples deposited at a sputter power of 1.5 W/cm2 (both as-deposited and after annealing) exhibited superior uniformity, and the phenomenon of composition loss resulting from annealing was not drastic. The composition distribution of as-deposited film produced at a substrate temperature 373 K approached that of ideal stoichiometry.
| Original language | English |
|---|---|
| Title of host publication | Frontier in Information Engineering for Mechanics and Materials |
| Pages | 63-68 |
| Number of pages | 6 |
| DOIs | |
| Publication status | Published - 2012 Oct 11 |
| Event | 2012 International Conference on Information Engineering for Mechanics and Materials, ICIMM 2012 - Hangzhou, China Duration: 2012 May 19 → 2012 May 22 |
Publication series
| Name | Applied Mechanics and Materials |
|---|---|
| Volume | 189 |
| ISSN (Print) | 1660-9336 |
| ISSN (Electronic) | 1662-7482 |
Other
| Other | 2012 International Conference on Information Engineering for Mechanics and Materials, ICIMM 2012 |
|---|---|
| Country | China |
| City | Hangzhou |
| Period | 12-05-19 → 12-05-22 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
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Effect of deposition conditions on the characterization of Cu(In,Ga)Se2 precursor films by sputtering process. / Lin, Yi-Cheng or Y. C.; Ke, J. H.; Chen, C. C.
Frontier in Information Engineering for Mechanics and Materials. 2012. p. 63-68 (Applied Mechanics and Materials; Vol. 189).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Effect of deposition conditions on the characterization of Cu(In,Ga)Se2 precursor films by sputtering process
AU - Lin, Yi-Cheng or Y. C.
AU - Ke, J. H.
AU - Chen, C. C.
PY - 2012/10/11
Y1 - 2012/10/11
N2 - In this study, Cu(In,Ga)Se2 (CIGS) thin films were deposited onto bi-layer Mo coated soda-lime glass by sputtering a chalcopyrite CIGS quaternary alloy target. The influence of sputtering power and substrate temperature on the characterization of CIGS precursor films was investigated. Experimental results demonstrate that the CIGS quaternary target has the characteristics of chalcopyrite structures. The samples deposited at a sputter power of 1.5 W/cm2 (both as-deposited and after annealing) exhibited superior uniformity, and the phenomenon of composition loss resulting from annealing was not drastic. The composition distribution of as-deposited film produced at a substrate temperature 373 K approached that of ideal stoichiometry.
AB - In this study, Cu(In,Ga)Se2 (CIGS) thin films were deposited onto bi-layer Mo coated soda-lime glass by sputtering a chalcopyrite CIGS quaternary alloy target. The influence of sputtering power and substrate temperature on the characterization of CIGS precursor films was investigated. Experimental results demonstrate that the CIGS quaternary target has the characteristics of chalcopyrite structures. The samples deposited at a sputter power of 1.5 W/cm2 (both as-deposited and after annealing) exhibited superior uniformity, and the phenomenon of composition loss resulting from annealing was not drastic. The composition distribution of as-deposited film produced at a substrate temperature 373 K approached that of ideal stoichiometry.
UR - http://www.scopus.com/inward/record.url?scp=84867144885&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84867144885&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMM.189.63
DO - 10.4028/www.scientific.net/AMM.189.63
M3 - Conference contribution
AN - SCOPUS:84867144885
SN - 9783037854594
T3 - Applied Mechanics and Materials
SP - 63
EP - 68
BT - Frontier in Information Engineering for Mechanics and Materials
ER -