Abstract
In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10- 4 Ω-cm, visible light transmittance of more than 84%, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties.
| Original language | English |
|---|---|
| Pages (from-to) | 1701-1705 |
| Number of pages | 5 |
| Journal | Thin Solid Films |
| Volume | 517 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 2009 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
Cite this
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Effect of deflection on the mechanical and optoelectronic properties of indium tin oxide films deposited on polyethylene terephthalate substrates by pulse magnetron sputtering. / Lin, Yi-Cheng or Y. C.; Shi, W. Q.; Chen, Z. Z.
In: Thin Solid Films, Vol. 517, No. 5, 01.01.2009, p. 1701-1705.Research output: Contribution to journal › Article
TY - JOUR
T1 - Effect of deflection on the mechanical and optoelectronic properties of indium tin oxide films deposited on polyethylene terephthalate substrates by pulse magnetron sputtering
AU - Lin, Yi-Cheng or Y. C.
AU - Shi, W. Q.
AU - Chen, Z. Z.
PY - 2009/1/1
Y1 - 2009/1/1
N2 - In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10- 4 Ω-cm, visible light transmittance of more than 84%, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties.
AB - In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10- 4 Ω-cm, visible light transmittance of more than 84%, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties.
UR - http://www.scopus.com/inward/record.url?scp=56949083063&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=56949083063&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2008.10.019
DO - 10.1016/j.tsf.2008.10.019
M3 - Article
AN - SCOPUS:56949083063
VL - 517
SP - 1701
EP - 1705
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - 5
ER -