Effect of deflection on the mechanical and optoelectronic properties of indium tin oxide films deposited on polyethylene terephthalate substrates by pulse magnetron sputtering

Yi-Cheng or Y. C. Lin, W. Q. Shi, Z. Z. Chen

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10- 4 Ω-cm, visible light transmittance of more than 84%, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties.

Original languageEnglish
Pages (from-to)1701-1705
Number of pages5
JournalThin Solid Films
Volume517
Issue number5
DOIs
Publication statusPublished - 2009 Jan 1

Fingerprint

Polyethylene Terephthalates
polyethylene terephthalate
Tin oxides
Optoelectronic devices
Polyethylene terephthalates
indium oxides
Magnetron sputtering
Indium
tin oxides
Oxide films
oxide films
deflection
magnetron sputtering
mechanical properties
Film thickness
adhesion
film thickness
Adhesion
Substrates
pulses

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Cite this

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abstract = "In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10- 4 Ω-cm, visible light transmittance of more than 84{\%}, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties.",
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N2 - In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10- 4 Ω-cm, visible light transmittance of more than 84%, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties.

AB - In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10- 4 Ω-cm, visible light transmittance of more than 84%, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties.

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