Effect of deflection on the mechanical and optoelectronic properties of indium tin oxide films deposited on polyethylene terephthalate substrates by pulse magnetron sputtering

Yi-Cheng or Y. C. Lin, W. Q. Shi, Z. Z. Chen

Research output: Contribution to journalArticle

34 Citations (Scopus)


In this research, we studied the effect of deflection on the characteristics of an indium tin oxide (ITO) film deposited on a flexible polyethylene terephthalate flexible substrate by pulse magnetron sputtering. The experimental results show that an increase in the ITO film thickness leads to an increase in the residual stress and a decrease in the adhesion. Under power of 80 W, pulse frequency of 10 kHz, pulse reverse time of 2 μs, and ITO film thickness of 100 nm, thin film with an optimized resistivity of 4.5 × 10- 4 Ω-cm, visible light transmittance of more than 84%, and adhesion of class 5B/0 as per the ASTM/ISO standards. Micro-cracking was observed on the ITO film surface when the film thickness was greater than 100 nm and when the deflection was carried out for 100 times. Micro-cracking led to an increase in the residual stress and deterioration in the adhesion properties.

Original languageEnglish
Pages (from-to)1701-1705
Number of pages5
JournalThin Solid Films
Issue number5
Publication statusPublished - 2009 Jan 1


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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