Dynamic Analysis of the X-shaped Groove Aerostatic Bearings with Disk-Spring Compensator

Ming Fei Chen; Yu Ting Lin

doi:10.1299/jsmec.45.492

Dynamic Analysis of the X-shaped Groove Aerostatic Bearings with Disk-Spring Compensator

Ming Fei Chen, Yu Ting Lin

Department of Mechatronic Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

This paper describes the development of the modified resistance network method (RNM) for analyzing the dynamic behaviors of X-shaped grooves aerostatic bearing with a passive disk-spring compensator. The Newmark integration method and the modified RNM, which takes into account on the equilibrium of the mass flow rate and the squeeze film effect, are used to analyze the time-dependent dynamic behaviors. Results show that after impulse most of the vibrations are absorbed by the disk-spring compensator and the table can maintain a small vibration around the equilibrium position.

Original language	English
Pages (from-to)	492-501
Number of pages	10
Journal	JSME International Journal. Series C: Mechanical Systems, Machine Elements and Manufacturing
Volume	45
Issue number	2
DOIs	https://doi.org/10.1299/jsmec.45.492
Publication status	Published - 2002

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1299/jsmec.45.492

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abstract = "This paper describes the development of the modified resistance network method (RNM) for analyzing the dynamic behaviors of X-shaped grooves aerostatic bearing with a passive disk-spring compensator. The Newmark integration method and the modified RNM, which takes into account on the equilibrium of the mass flow rate and the squeeze film effect, are used to analyze the time-dependent dynamic behaviors. Results show that after impulse most of the vibrations are absorbed by the disk-spring compensator and the table can maintain a small vibration around the equilibrium position.",

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