Abstract
Using traditional methods such as perturbation theory or Galerkin approach method to analyze the dynamic response of electrostatic devices is not easy due to the complexity of the interactions between the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Accordingly, the present study proposes a new approach for analyzing the dynamic response of such devices using a hybrid numerical scheme comprising the differential transformation method and the finite difference method by pure DC or combined DC / AC loading. The validity of the proposed scheme is confirmed by comparing the results obtained for the pull-in voltage of the micro-beam with those presented in the literature derived using a variety of schemes. Overall, the results show that the hybrid numerical scheme provides a suitable means of analyzing the nonlinear dynamic behavior of a wide variety of common electrostatically-actuated microstructures.
| Original language | English |
|---|---|
| Title of host publication | Modern Materials and Technologies of Industrial Production |
| Pages | 474-477 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2013 Nov 4 |
| Event | 2nd International Conference on Mechanical Properties of Materials and Information Technology, ICMPMIT 2013 - , Hong Kong Duration: 2013 Aug 17 → 2013 Aug 19 |
Publication series
| Name | Advanced Materials Research |
|---|---|
| Volume | 811 |
| ISSN (Print) | 1022-6680 |
Other
| Other | 2nd International Conference on Mechanical Properties of Materials and Information Technology, ICMPMIT 2013 |
|---|---|
| Country | Hong Kong |
| Period | 13-08-17 → 13-08-19 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
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Dynamic analysis of micro devices with squeeze-film damping effect using hybrid numerical scheme. / Liu, Chin-Chia.
Modern Materials and Technologies of Industrial Production. 2013. p. 474-477 (Advanced Materials Research; Vol. 811).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Dynamic analysis of micro devices with squeeze-film damping effect using hybrid numerical scheme
AU - Liu, Chin-Chia
PY - 2013/11/4
Y1 - 2013/11/4
N2 - Using traditional methods such as perturbation theory or Galerkin approach method to analyze the dynamic response of electrostatic devices is not easy due to the complexity of the interactions between the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Accordingly, the present study proposes a new approach for analyzing the dynamic response of such devices using a hybrid numerical scheme comprising the differential transformation method and the finite difference method by pure DC or combined DC / AC loading. The validity of the proposed scheme is confirmed by comparing the results obtained for the pull-in voltage of the micro-beam with those presented in the literature derived using a variety of schemes. Overall, the results show that the hybrid numerical scheme provides a suitable means of analyzing the nonlinear dynamic behavior of a wide variety of common electrostatically-actuated microstructures.
AB - Using traditional methods such as perturbation theory or Galerkin approach method to analyze the dynamic response of electrostatic devices is not easy due to the complexity of the interactions between the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Accordingly, the present study proposes a new approach for analyzing the dynamic response of such devices using a hybrid numerical scheme comprising the differential transformation method and the finite difference method by pure DC or combined DC / AC loading. The validity of the proposed scheme is confirmed by comparing the results obtained for the pull-in voltage of the micro-beam with those presented in the literature derived using a variety of schemes. Overall, the results show that the hybrid numerical scheme provides a suitable means of analyzing the nonlinear dynamic behavior of a wide variety of common electrostatically-actuated microstructures.
UR - http://www.scopus.com/inward/record.url?scp=84886700300&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84886700300&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/AMR.811.474
DO - 10.4028/www.scientific.net/AMR.811.474
M3 - Conference contribution
AN - SCOPUS:84886700300
SN - 9783037858608
T3 - Advanced Materials Research
SP - 474
EP - 477
BT - Modern Materials and Technologies of Industrial Production
ER -