TY - GEN
T1 - Dynamic analysis of micro devices with squeeze-film damping effect using hybrid numerical scheme
AU - Liu, Chin-Chia
PY - 2013/11/4
Y1 - 2013/11/4
N2 - Using traditional methods such as perturbation theory or Galerkin approach method to analyze the dynamic response of electrostatic devices is not easy due to the complexity of the interactions between the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Accordingly, the present study proposes a new approach for analyzing the dynamic response of such devices using a hybrid numerical scheme comprising the differential transformation method and the finite difference method by pure DC or combined DC / AC loading. The validity of the proposed scheme is confirmed by comparing the results obtained for the pull-in voltage of the micro-beam with those presented in the literature derived using a variety of schemes. Overall, the results show that the hybrid numerical scheme provides a suitable means of analyzing the nonlinear dynamic behavior of a wide variety of common electrostatically-actuated microstructures.
AB - Using traditional methods such as perturbation theory or Galerkin approach method to analyze the dynamic response of electrostatic devices is not easy due to the complexity of the interactions between the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Accordingly, the present study proposes a new approach for analyzing the dynamic response of such devices using a hybrid numerical scheme comprising the differential transformation method and the finite difference method by pure DC or combined DC / AC loading. The validity of the proposed scheme is confirmed by comparing the results obtained for the pull-in voltage of the micro-beam with those presented in the literature derived using a variety of schemes. Overall, the results show that the hybrid numerical scheme provides a suitable means of analyzing the nonlinear dynamic behavior of a wide variety of common electrostatically-actuated microstructures.
UR - http://www.scopus.com/inward/record.url?scp=84886700300&partnerID=8YFLogxK
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U2 - 10.4028/www.scientific.net/AMR.811.474
DO - 10.4028/www.scientific.net/AMR.811.474
M3 - Conference contribution
AN - SCOPUS:84886700300
SN - 9783037858608
T3 - Advanced Materials Research
SP - 474
EP - 477
BT - Modern Materials and Technologies of Industrial Production
T2 - 2nd International Conference on Mechanical Properties of Materials and Information Technology, ICMPMIT 2013
Y2 - 17 August 2013 through 19 August 2013
ER -