Abstract
This paper shows the design, fabrication and characterization of novel micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab. The PnC slab was made by etching a square array of cylindrical air holes in a 10μm thick free-standing silicon plate, while the defects are created by replacing periodically arranged three rows of air holes with one row of air holes at the centre of the PnC region. The radius of the central air holes (r') is also varied to study the effect of r' on the performance of the PnC resonators. Piezoelectric aluminium nitride (AlN) film is employed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a pure PnC structure with a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators reaches its maximum value (174.67MHz) when central-hole radius (r') reaches 8μm, while Q factor reaches maximum (893) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics and may be further optimized for applications such as microfluidics, biomedical devices and RF communications in GHz range.
| Original language | English |
|---|---|
| Title of host publication | 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
| Pages | 326-330 |
| Number of pages | 5 |
| DOIs | |
| Publication status | Published - 2012 Jun 1 |
| Event | 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan Duration: 2012 Mar 5 → 2012 Mar 8 |
Publication series
| Name | 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
|---|
Other
| Other | 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
|---|---|
| Country | Japan |
| City | Kyoto |
| Period | 12-03-05 → 12-03-08 |
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All Science Journal Classification (ASJC) codes
- Engineering (miscellaneous)
Cite this
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Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. / Wang, Nan; Hsiao, Fu Li; Palaniapan, Moorthi; Lee, Chengkuo.
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 326-330 6196785 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
AU - Wang, Nan
AU - Hsiao, Fu Li
AU - Palaniapan, Moorthi
AU - Lee, Chengkuo
PY - 2012/6/1
Y1 - 2012/6/1
N2 - This paper shows the design, fabrication and characterization of novel micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab. The PnC slab was made by etching a square array of cylindrical air holes in a 10μm thick free-standing silicon plate, while the defects are created by replacing periodically arranged three rows of air holes with one row of air holes at the centre of the PnC region. The radius of the central air holes (r') is also varied to study the effect of r' on the performance of the PnC resonators. Piezoelectric aluminium nitride (AlN) film is employed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a pure PnC structure with a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators reaches its maximum value (174.67MHz) when central-hole radius (r') reaches 8μm, while Q factor reaches maximum (893) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics and may be further optimized for applications such as microfluidics, biomedical devices and RF communications in GHz range.
AB - This paper shows the design, fabrication and characterization of novel micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab. The PnC slab was made by etching a square array of cylindrical air holes in a 10μm thick free-standing silicon plate, while the defects are created by replacing periodically arranged three rows of air holes with one row of air holes at the centre of the PnC region. The radius of the central air holes (r') is also varied to study the effect of r' on the performance of the PnC resonators. Piezoelectric aluminium nitride (AlN) film is employed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a pure PnC structure with a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators reaches its maximum value (174.67MHz) when central-hole radius (r') reaches 8μm, while Q factor reaches maximum (893) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics and may be further optimized for applications such as microfluidics, biomedical devices and RF communications in GHz range.
UR - http://www.scopus.com/inward/record.url?scp=84861557518&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84861557518&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2012.6196785
DO - 10.1109/NEMS.2012.6196785
M3 - Conference contribution
AN - SCOPUS:84861557518
SN - 9781467311243
T3 - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
SP - 326
EP - 330
BT - 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
ER -