Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

Nan Wang, Fu Li Hsiao, Moorthi Palaniapan, Chengkuo Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper shows the design, fabrication and characterization of novel micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab. The PnC slab was made by etching a square array of cylindrical air holes in a 10μm thick free-standing silicon plate, while the defects are created by replacing periodically arranged three rows of air holes with one row of air holes at the centre of the PnC region. The radius of the central air holes (r') is also varied to study the effect of r' on the performance of the PnC resonators. Piezoelectric aluminium nitride (AlN) film is employed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a pure PnC structure with a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators reaches its maximum value (174.67MHz) when central-hole radius (r') reaches 8μm, while Q factor reaches maximum (893) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics and may be further optimized for applications such as microfluidics, biomedical devices and RF communications in GHz range.

Original languageEnglish
Title of host publication2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
Pages326-330
Number of pages5
DOIs
Publication statusPublished - 2012 Jun 1
Event7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
Duration: 2012 Mar 52012 Mar 8

Publication series

Name2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Other

Other7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
CountryJapan
CityKyoto
Period12-03-0512-03-08

Fingerprint

Crystal resonators
Silicon
Air
Crystals
Crystal structure
Micromechanical resonators
Defects
Aluminum nitride
Microfabrication
Microfluidics
Crystal lattices
Transducers
Etching
Natural frequencies
Acoustics
Acoustic waves
Fabrication
Communication

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

Cite this

Wang, N., Hsiao, F. L., Palaniapan, M., & Lee, C. (2012). Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. In 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 (pp. 326-330). [6196785] (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196785
Wang, Nan ; Hsiao, Fu Li ; Palaniapan, Moorthi ; Lee, Chengkuo. / Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. pp. 326-330 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).
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abstract = "This paper shows the design, fabrication and characterization of novel micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab. The PnC slab was made by etching a square array of cylindrical air holes in a 10μm thick free-standing silicon plate, while the defects are created by replacing periodically arranged three rows of air holes with one row of air holes at the centre of the PnC region. The radius of the central air holes (r') is also varied to study the effect of r' on the performance of the PnC resonators. Piezoelectric aluminium nitride (AlN) film is employed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a pure PnC structure with a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators reaches its maximum value (174.67MHz) when central-hole radius (r') reaches 8μm, while Q factor reaches maximum (893) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics and may be further optimized for applications such as microfluidics, biomedical devices and RF communications in GHz range.",
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Wang, N, Hsiao, FL, Palaniapan, M & Lee, C 2012, Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. in 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012., 6196785, 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, pp. 326-330, 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, 12-03-05. https://doi.org/10.1109/NEMS.2012.6196785

Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. / Wang, Nan; Hsiao, Fu Li; Palaniapan, Moorthi; Lee, Chengkuo.

2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 326-330 6196785 (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - This paper shows the design, fabrication and characterization of novel micromechanical resonators with Bloch-mode resonance by creating defects on a two-dimensional (2-D) silicon phononic crystal (PnC) slab. The PnC slab was made by etching a square array of cylindrical air holes in a 10μm thick free-standing silicon plate, while the defects are created by replacing periodically arranged three rows of air holes with one row of air holes at the centre of the PnC region. The radius of the central air holes (r') is also varied to study the effect of r' on the performance of the PnC resonators. Piezoelectric aluminium nitride (AlN) film is employed as the inter-digital transducers (IDT) to transmit and detect acoustic waves, thus making the whole microfabrication process CMOS-compatible. We also fabricate a pure PnC structure with a stopband of 140MHz < f <195MHz which agrees quite well with the simulation results. The characterized resonant frequency of microfabricated PnC resonators reaches its maximum value (174.67MHz) when central-hole radius (r') reaches 8μm, while Q factor reaches maximum (893) at r'=6μm. The Bloch-mode PnC resonators based on square lattice PnC structure show promising acoustic resonance characteristics and may be further optimized for applications such as microfluidics, biomedical devices and RF communications in GHz range.

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Wang N, Hsiao FL, Palaniapan M, Lee C. Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. In 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012. 2012. p. 326-330. 6196785. (2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012). https://doi.org/10.1109/NEMS.2012.6196785