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Dive into the research topics of 'Development of a flat type six-axis stage based on piezoelectric actuators'. Together they form a unique fingerprint.
Mathematics
Piezoelectric Actuator
Positioning
PI Controller
Feedforward
Compensator
Laser Diode
Optical Measurement
Photodiode
Error Compensation
Real-time Control
Field Programmable Gate Array
Measurement System
Optical System
Actuator
Lens
Relationships
Quadrant
Hysteresis
Closed-loop
Degree of freedom
Module
Range of data
Performance
Engineering & Materials Science
Piezoelectric actuators
Photodiodes
Semiconductor lasers
Error compensation
Real time control
Controllers
Lenses
Hysteresis
Field programmable gate arrays (FPGA)
Compensation and Redress
Actuators
Feedback