Development and traceability of a multi-functional microscope

Wen Jong Chen, Chih Kung Lee, Shui Shong Lua, Yu Jena Chang, Yu Chiaa Chang, Chi Yuana Chang, Shuen Chen Shiue, Shu Sheng Lee, Huay Chung Liou

Research output: Contribution to journalConference article

Abstract

A multi-functional microscope named Morphininscope, which was designed to switch between various measurement functions by simply rotating its turret or turning on some sub-systems, was presented. Some of the various built-in functions of this microscope, including a confocal microscope, a photon-tunneling microscope, a laser based phase-shifting interferometry microscope, a Linnik interference microscope, and an ellipsometer, etc. are examined. The opportunity to bring traceability to thin-film or nano-materials metrology, which is an issue under extensive investigations now, offered by the multi-functional microscope were also detailed. Design thinking, optical and opto-mechanical configurations adopted, and experimental results of this newly multi-functional microscope were examined. Measurement of a grating surface, the real and the imaginary complex refractive indices, and the corrected surface profile of an inhomogeneous specimen were used to demonstrate the performance and advantages of this type of multi-functional microscope. Potential to achieve and transfer traceability of the primary standard in Morphinscope was also discussed.

Original languageEnglish
Pages (from-to)207-216
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4401
DOIs
Publication statusPublished - 2001 Dec 1
EventRecent Developments in Traceable Dimensional Measurement - Munich, Germany
Duration: 2001 Jun 202001 Jun 21

Fingerprint

Traceability
Microscope
Microscopes
microscopes
turret
Surface Profile
Phase Shifting
Nanomaterials
ellipsometers
Optical design
Confocal
Interferometry
Metrology
Refractive Index
Gratings
metrology
Thin Films
Refractive index
Switch
Rotating

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Chen, Wen Jong ; Lee, Chih Kung ; Lua, Shui Shong ; Chang, Yu Jena ; Chang, Yu Chiaa ; Chang, Chi Yuana ; Shiue, Shuen Chen ; Lee, Shu Sheng ; Liou, Huay Chung. / Development and traceability of a multi-functional microscope. In: Proceedings of SPIE - The International Society for Optical Engineering. 2001 ; Vol. 4401. pp. 207-216.
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Chen, WJ, Lee, CK, Lua, SS, Chang, YJ, Chang, YC, Chang, CY, Shiue, SC, Lee, SS & Liou, HC 2001, 'Development and traceability of a multi-functional microscope', Proceedings of SPIE - The International Society for Optical Engineering, vol. 4401, pp. 207-216. https://doi.org/10.1117/12.445622

Development and traceability of a multi-functional microscope. / Chen, Wen Jong; Lee, Chih Kung; Lua, Shui Shong; Chang, Yu Jena; Chang, Yu Chiaa; Chang, Chi Yuana; Shiue, Shuen Chen; Lee, Shu Sheng; Liou, Huay Chung.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4401, 01.12.2001, p. 207-216.

Research output: Contribution to journalConference article

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AU - Chen, Wen Jong

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AU - Chang, Yu Chiaa

AU - Chang, Chi Yuana

AU - Shiue, Shuen Chen

AU - Lee, Shu Sheng

AU - Liou, Huay Chung

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