Development and traceability of a multi-functional microscope

Wen Jong Chen, Chih Kung Lee, Shui Shong Lua, Yu Jena Chang, Yu Chiaa Chang, Chi Yuana Chang, Shuen Chen Shiue, Shu Sheng Lee, Huay Chung Liou

Research output: Contribution to journalConference article

Abstract

A multi-functional microscope named Morphininscope, which was designed to switch between various measurement functions by simply rotating its turret or turning on some sub-systems, was presented. Some of the various built-in functions of this microscope, including a confocal microscope, a photon-tunneling microscope, a laser based phase-shifting interferometry microscope, a Linnik interference microscope, and an ellipsometer, etc. are examined. The opportunity to bring traceability to thin-film or nano-materials metrology, which is an issue under extensive investigations now, offered by the multi-functional microscope were also detailed. Design thinking, optical and opto-mechanical configurations adopted, and experimental results of this newly multi-functional microscope were examined. Measurement of a grating surface, the real and the imaginary complex refractive indices, and the corrected surface profile of an inhomogeneous specimen were used to demonstrate the performance and advantages of this type of multi-functional microscope. Potential to achieve and transfer traceability of the primary standard in Morphinscope was also discussed.

Original languageEnglish
Pages (from-to)207-216
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4401
DOIs
Publication statusPublished - 2001 Dec 1
EventRecent Developments in Traceable Dimensional Measurement - Munich, Germany
Duration: 2001 Jun 202001 Jun 21

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Chen, W. J., Lee, C. K., Lua, S. S., Chang, Y. J., Chang, Y. C., Chang, C. Y., Shiue, S. C., Lee, S. S., & Liou, H. C. (2001). Development and traceability of a multi-functional microscope. Proceedings of SPIE - The International Society for Optical Engineering, 4401, 207-216. https://doi.org/10.1117/12.445622