Abstract
This paper introduces a novel deterministic three-dimensional micro-assembly method to tackle the difficulty of micro-part assembling at unstable equilibrium region. We design, characterize and manufacture an parallel assembly system, which is capable of connecting micro-parts from almost arbitrary direction into desired structures in batch processes. This paper also introduces a non-contact method to measurement the surface adhesion forces among parts, donor and receiver substrates. Five successive 3D micro-assembly processes have be tested with yield ratio investigation to demonstrate this technology. Table 1. A comparison of this study to some published three-dimensional assembly technologies
Original language | English |
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Title of host publication | NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems |
Pages | 1128-1131 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2011 Oct 4 |
Event | 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan Duration: 2011 Feb 20 → 2011 Feb 23 |
Other
Other | 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 |
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Country | Taiwan |
City | Kaohsiung |
Period | 11-02-20 → 11-02-23 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics