Deterministic three-dimensional micro-assembly in parallel

Huo Chuan Lin; Chia Chung Wang; Kerwin Wang

doi:10.1109/NEMS.2011.6017555

Deterministic three-dimensional micro-assembly in parallel

Huo Chuan Lin, Chia Chung Wang, Kerwin Wang

Department of Mechatronic Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper introduces a novel deterministic three-dimensional micro-assembly method to tackle the difficulty of micro-part assembling at unstable equilibrium region. We design, characterize and manufacture an parallel assembly system, which is capable of connecting micro-parts from almost arbitrary direction into desired structures in batch processes. This paper also introduces a non-contact method to measurement the surface adhesion forces among parts, donor and receiver substrates. Five successive 3D micro-assembly processes have be tested with yield ratio investigation to demonstrate this technology. Table 1. A comparison of this study to some published three-dimensional assembly technologies

Original language	English
Title of host publication	NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages	1128-1131
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2011.6017555
Publication status	Published - 2011 Oct 4
Event	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan Duration: 2011 Feb 20 → 2011 Feb 23

Other

Other	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Country	Taiwan
City	Kaohsiung
Period	11-02-20 → 11-02-23

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

Access to Document

10.1109/NEMS.2011.6017555

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Cite this

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abstract = "This paper introduces a novel deterministic three-dimensional micro-assembly method to tackle the difficulty of micro-part assembling at unstable equilibrium region. We design, characterize and manufacture an parallel assembly system, which is capable of connecting micro-parts from almost arbitrary direction into desired structures in batch processes. This paper also introduces a non-contact method to measurement the surface adhesion forces among parts, donor and receiver substrates. Five successive 3D micro-assembly processes have be tested with yield ratio investigation to demonstrate this technology. Table 1. A comparison of this study to some published three-dimensional assembly technologies",

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Lin, HC, Wang, CC & Wang, K 2011, Deterministic three-dimensional micro-assembly in parallel. in NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems., 6017555, pp. 1128-1131, 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, 11-02-20. https://doi.org/10.1109/NEMS.2011.6017555

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AB - This paper introduces a novel deterministic three-dimensional micro-assembly method to tackle the difficulty of micro-part assembling at unstable equilibrium region. We design, characterize and manufacture an parallel assembly system, which is capable of connecting micro-parts from almost arbitrary direction into desired structures in batch processes. This paper also introduces a non-contact method to measurement the surface adhesion forces among parts, donor and receiver substrates. Five successive 3D micro-assembly processes have be tested with yield ratio investigation to demonstrate this technology. Table 1. A comparison of this study to some published three-dimensional assembly technologies

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