Abstract
In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications.
| Original language | English |
|---|---|
| Pages (from-to) | 469-473 |
| Number of pages | 5 |
| Journal | Colloids and Surfaces A: Physicochemical and Engineering Aspects |
| Volume | 313-314 |
| DOIs | |
| Publication status | Published - 2008 Feb 1 |
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All Science Journal Classification (ASJC) codes
- Colloid and Surface Chemistry
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Design of electrostatically actuated MEMS switches. / Lai, Yeong-Lin; Chang, L. H.
In: Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 313-314, 01.02.2008, p. 469-473.Research output: Contribution to journal › Article
TY - JOUR
T1 - Design of electrostatically actuated MEMS switches
AU - Lai, Yeong-Lin
AU - Chang, L. H.
PY - 2008/2/1
Y1 - 2008/2/1
N2 - In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications.
AB - In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications.
UR - http://www.scopus.com/inward/record.url?scp=37349073059&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=37349073059&partnerID=8YFLogxK
U2 - 10.1016/j.colsurfa.2007.05.074
DO - 10.1016/j.colsurfa.2007.05.074
M3 - Article
AN - SCOPUS:37349073059
VL - 313-314
SP - 469
EP - 473
JO - Colloids and Surfaces A: Physicochemical and Engineering Aspects
JF - Colloids and Surfaces A: Physicochemical and Engineering Aspects
SN - 0927-7757
ER -