Design of electrostatically actuated MEMS switches

Yeong-Lin Lai, L. H. Chang

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications.

Original languageEnglish
Pages (from-to)469-473
Number of pages5
JournalColloids and Surfaces A: Physicochemical and Engineering Aspects
Volume313-314
DOIs
Publication statusPublished - 2008 Feb 1

Fingerprint

microelectromechanical systems
MEMS
switches
Switches
Mechatronics
radio frequencies
tapering
Insertion losses
insertion loss
Electromagnetic waves
isolation
electromagnetic radiation
finite element method
methodology
Finite element method
electronics
simulation

All Science Journal Classification (ASJC) codes

  • Colloid and Surface Chemistry

Cite this

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Design of electrostatically actuated MEMS switches. / Lai, Yeong-Lin; Chang, L. H.

In: Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 313-314, 01.02.2008, p. 469-473.

Research output: Contribution to journalArticle

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AB - In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications.

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