Design of electrostatically actuated MEMS switches

Yeong-Lin Lai; L. H. Chang

doi:10.1016/j.colsurfa.2007.05.074

Design of electrostatically actuated MEMS switches

Yeong-Lin Lai, L. H. Chang

Department of Mechatronic Engineering

Research output: Contribution to journal › Article

9 Citations (Scopus)

Abstract

In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications.

Original language	English
Pages (from-to)	469-473
Number of pages	5
Journal	Colloids and Surfaces A: Physicochemical and Engineering Aspects
Volume	313-314
DOIs	https://doi.org/10.1016/j.colsurfa.2007.05.074
Publication status	Published - 2008 Feb 1

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All Science Journal Classification (ASJC) codes

Colloid and Surface Chemistry

Cite this

Lai, Y-L., & Chang, L. H. (2008). Design of electrostatically actuated MEMS switches. Colloids and Surfaces A: Physicochemical and Engineering Aspects, 313-314, 469-473. https://doi.org/10.1016/j.colsurfa.2007.05.074

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Access to Document

10.1016/j.colsurfa.2007.05.074