Design of electrostatically actuated MEMS switches

Yeong-Lin Lai, L. H. Chang

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications.

Original languageEnglish
Pages (from-to)469-473
Number of pages5
JournalColloids and Surfaces A: Physicochemical and Engineering Aspects
Volume313-314
DOIs
Publication statusPublished - 2008 Feb 1

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All Science Journal Classification (ASJC) codes

  • Colloid and Surface Chemistry

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