Abstract
An innovative microscope system, named Morphinscope, that integrates the function of a confocal microscope, a photon tunneling microscope, a laser based phase-shifting interferometry microscope, and an ellipsometer was developed to facilitate the measurement of inhomogeneous surface profile. Design, configurations, and experimental data of this newly developed instrument were all detailed.
Original language | English |
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Title of host publication | Multi-Modality Microscopy |
Publisher | World Scientific Publishing Co. |
Pages | 178-187 |
Number of pages | 10 |
ISBN (Electronic) | 9789812774620 |
ISBN (Print) | 9812565337, 9789812565334 |
DOIs | |
Publication status | Published - 2006 Jan 1 |
All Science Journal Classification (ASJC) codes
- Engineering(all)