Design and performance evaluation of a multi-functional microscopy

Wen Jong Chen, Chih Kung Lee, Shui Shong Lu

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

An innovative microscope system, named Morphinscope, that integrates the function of a confocal microscope, a photon tunneling microscope, a laser based phase-shifting interferometry microscope, and an ellipsometer was developed to facilitate the measurement of inhomogeneous surface profile. Design, configurations, and experimental data of this newly developed instrument were all detailed.

Original languageEnglish
Title of host publicationMulti-Modality Microscopy
PublisherWorld Scientific Publishing Co.
Pages178-187
Number of pages10
ISBN (Electronic)9789812774620
ISBN (Print)9812565337, 9789812565334
DOIs
Publication statusPublished - 2006 Jan 1

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All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Chen, W. J., Lee, C. K., & Lu, S. S. (2006). Design and performance evaluation of a multi-functional microscopy. In Multi-Modality Microscopy (pp. 178-187). World Scientific Publishing Co.. https://doi.org/10.1142/9789812774620_0007