Abstract
An innovative microscope system, named Morphinscope, that integrates the function of a confocal microscope, a photon tunneling microscope, a laser based phase-shifting interferometry microscope, and an ellipsometer was developed to facilitate the measurement of inhomogeneous surface profile. Design, configurations, and experimental data of this newly developed instrument were all detailed.
| Original language | English |
|---|---|
| Title of host publication | Multi-Modality Microscopy |
| Publisher | World Scientific Publishing Co. |
| Pages | 178-187 |
| Number of pages | 10 |
| ISBN (Electronic) | 9789812774620 |
| ISBN (Print) | 9812565337, 9789812565334 |
| DOIs | |
| Publication status | Published - 2006 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
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Design and performance evaluation of a multi-functional microscopy. / Chen, Wen Jong; Lee, Chih Kung; Lu, Shui Shong.
Multi-Modality Microscopy. World Scientific Publishing Co., 2006. p. 178-187.Research output: Chapter in Book/Report/Conference proceeding › Chapter
TY - CHAP
T1 - Design and performance evaluation of a multi-functional microscopy
AU - Chen, Wen Jong
AU - Lee, Chih Kung
AU - Lu, Shui Shong
PY - 2006/1/1
Y1 - 2006/1/1
N2 - An innovative microscope system, named Morphinscope, that integrates the function of a confocal microscope, a photon tunneling microscope, a laser based phase-shifting interferometry microscope, and an ellipsometer was developed to facilitate the measurement of inhomogeneous surface profile. Design, configurations, and experimental data of this newly developed instrument were all detailed.
AB - An innovative microscope system, named Morphinscope, that integrates the function of a confocal microscope, a photon tunneling microscope, a laser based phase-shifting interferometry microscope, and an ellipsometer was developed to facilitate the measurement of inhomogeneous surface profile. Design, configurations, and experimental data of this newly developed instrument were all detailed.
UR - http://www.scopus.com/inward/record.url?scp=84968820866&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84968820866&partnerID=8YFLogxK
U2 - 10.1142/9789812774620_0007
DO - 10.1142/9789812774620_0007
M3 - Chapter
AN - SCOPUS:84968820866
SN - 9812565337
SN - 9789812565334
SP - 178
EP - 187
BT - Multi-Modality Microscopy
PB - World Scientific Publishing Co.
ER -