Design and performance evaluation of a multi-functional microscopy

Wen Jong Chen; Chih Kung Lee; Shui Shong Lu

doi:10.1142/9789812774620_0007

Design and performance evaluation of a multi-functional microscopy

Wen Jong Chen, Chih Kung Lee, Shui Shong Lu

Department of Industrial Education and Technology

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

An innovative microscope system, named Morphinscope, that integrates the function of a confocal microscope, a photon tunneling microscope, a laser based phase-shifting interferometry microscope, and an ellipsometer was developed to facilitate the measurement of inhomogeneous surface profile. Design, configurations, and experimental data of this newly developed instrument were all detailed.

Original language	English
Title of host publication	Multi-Modality Microscopy
Publisher	World Scientific Publishing Co.
Pages	178-187
Number of pages	10
ISBN (Electronic)	9789812774620
ISBN (Print)	9812565337, 9789812565334
DOIs	https://doi.org/10.1142/9789812774620_0007
Publication status	Published - 2006 Jan 1

All Science Journal Classification (ASJC) codes

Engineering(all)

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