Abstract
An innovative microscope system, named Morphinscope, that integrates the function of a confocal microscope, a photon tunneling microscope, a laser based phase-shifting interferometry microscope, and an ellipsometer was developed to facilitate the measurement of inhomogeneous surface profile. Design, configurations, and experimental data of this newly developed instrument were all detailed.
| Original language | English |
|---|---|
| Title of host publication | Multi-Modality Microscopy |
| Publisher | World Scientific Publishing Co. |
| Pages | 178-187 |
| Number of pages | 10 |
| ISBN (Electronic) | 9789812774620 |
| ISBN (Print) | 9812565337, 9789812565334 |
| DOIs | |
| Publication status | Published - 2006 Jan 1 |
All Science Journal Classification (ASJC) codes
- Engineering(all)
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Chen, W. J., Lee, C. K., & Lu, S. S. (2006). Design and performance evaluation of a multi-functional microscopy. In Multi-Modality Microscopy (pp. 178-187). World Scientific Publishing Co.. https://doi.org/10.1142/9789812774620_0007