Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system

Jenq-Shinn Wu, Y. K. Huang, F. L. Wu, Der-Yuh Lin

Research output: Contribution to journalReview article

1 Citation (Scopus)

Abstract

We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr 0.52Ti 0.48O 3 (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pCN, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 Cm 2.

Original languageEnglish
Article number085110
JournalReview of Scientific Instruments
Volume83
Issue number8
DOIs
Publication statusPublished - 2012 Aug 1

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coefficients
Piezoelectric ceramics
piezoelectric ceramics
sensors
Sensors
pressing
Thin films
thin films

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

@article{445a07da735a447a97008d90e4cdfd18,
title = "Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system",
abstract = "We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr 0.52Ti 0.48O 3 (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pCN, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 Cm 2.",
author = "Jenq-Shinn Wu and Huang, {Y. K.} and Wu, {F. L.} and Der-Yuh Lin",
year = "2012",
month = "8",
day = "1",
doi = "10.1063/1.4746769",
language = "English",
volume = "83",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "8",

}

Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system. / Wu, Jenq-Shinn; Huang, Y. K.; Wu, F. L.; Lin, Der-Yuh.

In: Review of Scientific Instruments, Vol. 83, No. 8, 085110, 01.08.2012.

Research output: Contribution to journalReview article

TY - JOUR

T1 - Design and implementation of a versatile and variable-frequency piezoelectric coefficient measurement system

AU - Wu, Jenq-Shinn

AU - Huang, Y. K.

AU - Wu, F. L.

AU - Lin, Der-Yuh

PY - 2012/8/1

Y1 - 2012/8/1

N2 - We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr 0.52Ti 0.48O 3 (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pCN, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 Cm 2.

AB - We present a simple but versatile piezoelectric coefficient measurement system, which can measure the longitudinal and transverse piezoelectric coefficients in the pressing and bending modes, respectively, at different applied forces and a wide range of frequencies. The functionality of this measurement system has been demonstrated on three samples, including a PbZr 0.52Ti 0.48O 3 (PZT) piezoelectric ceramic bulk, a ZnO thin film, and a laminated piezoelectric film sensor. The static longitudinal piezoelectric coefficients of the PZT bulk and the ZnO film are estimated to be around 210 and 8.1 pCN, respectively. The static transverse piezoelectric coefficients of the ZnO film and the piezoelectric film sensor are determined to be, respectively, -0.284 and -0.031 Cm 2.

UR - http://www.scopus.com/inward/record.url?scp=84865787481&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84865787481&partnerID=8YFLogxK

U2 - 10.1063/1.4746769

DO - 10.1063/1.4746769

M3 - Review article

VL - 83

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 8

M1 - 085110

ER -