Efficient generation of extreme UV (EUV) light at λ = 13.5 nm from a bulk Sn target has been demonstrated by using a fiber laser. The conversion efficiency from the 1064 nm IR to the EUV was measured to be around 0.9% into 2π steradians within a 2% bandwidth. To the best of our knowledge, this is the first time an all-fiber system was used to generate EUV or soft x rays.
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics