Configuration analysis of sensing element for photonic crystal based NEMS cantilever using dual nano-ring resonator

Bo Li, Fu Li Hsiao, Chengkuo Lee

Research output: Contribution to journalArticle

24 Citations (Scopus)


Photonic crystal (PhC) based channel drop filters including two hexagonal rings in a two dimensional (2-D) photonic crystal silicon slab of hexagonal lattice are integrated on microcantilevers for nanoelectromechanical systems (NEMS) sensor applications. The proposed two hexagonal rings are named as dual nano-ring (DNR) resonator. The sensing characteristics of dual nano-ring (DNR) resonator at various positions adjacent to the junction of the microcantilever and the substrate are investigated. The derived quality factors is over 3000, and the minimum detectable force can be as small as 7.58 nN. Moreover, the continuous wave field distribution modeling is deployed to explain the origins of resonant mechanisms occurred in deformed DNR resonator under various applied forces.

Original languageEnglish
Pages (from-to)352-361
Number of pages10
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - 2011 Oct 1


All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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