Configuration analysis of sensing element for photonic crystal based NEMS cantilever using dual nano-ring resonator

Bo Li, Fu Li Hsiao, Chengkuo Lee

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

Photonic crystal (PhC) based channel drop filters including two hexagonal rings in a two dimensional (2-D) photonic crystal silicon slab of hexagonal lattice are integrated on microcantilevers for nanoelectromechanical systems (NEMS) sensor applications. The proposed two hexagonal rings are named as dual nano-ring (DNR) resonator. The sensing characteristics of dual nano-ring (DNR) resonator at various positions adjacent to the junction of the microcantilever and the substrate are investigated. The derived quality factors is over 3000, and the minimum detectable force can be as small as 7.58 nN. Moreover, the continuous wave field distribution modeling is deployed to explain the origins of resonant mechanisms occurred in deformed DNR resonator under various applied forces.

Original languageEnglish
Pages (from-to)352-361
Number of pages10
JournalSensors and Actuators, A: Physical
Volume169
Issue number2
DOIs
Publication statusPublished - 2011 Oct 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Configuration analysis of sensing element for photonic crystal based NEMS cantilever using dual nano-ring resonator'. Together they form a unique fingerprint.

Cite this