Configuration analysis of sensing element for microcantilever sensor using dual nano-ring resonator

Bo Li, Fu Li Hsiao, Chengkuo Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Two photonic crystal rings of hexagonal lattice are lying transversely and longitudinally in silicon microcantilever at the junction of the microcantilever and the substrate. This unique dual nano-ring (DNR) resonator demonstrates channel drop filter characteristics. When DNR is used as sensing element of a microcantilever sensor, the wavelength shift of resonant peak measured at the backward drop terminal is a function of applied force at the microcantilever tip. The derived Q-factor is about 3000, and the minimum detectable force can be as small as 37nN for longitudinal case and 16.7nN for transverse case.

Original languageEnglish
Title of host publication2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages181-182
Number of pages2
DOIs
Publication statusPublished - 2010 Dec 1
Event2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
Duration: 2010 Aug 92010 Aug 12

Publication series

Name2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Other

Other2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
CountryJapan
CitySapporo
Period10-08-0910-08-12

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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    Li, B., Hsiao, F. L., & Lee, C. (2010). Configuration analysis of sensing element for microcantilever sensor using dual nano-ring resonator. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 181-182). [5672125] (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672125