Computational study of an optical NEMS sensor

Chengkuo Lee, Wenfeng Xiang, Fu Li Hsiao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Optical nanoelectromechanical systems (NEMS) based cantilever sensor embedded with a nanocavity resonator is investigated in this study. The resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the nanocavity resonator. The sensor characteristics of NEMS-cantilevers with various lengths and the same nanocavity structure are studied in air and water.

Original languageEnglish
Title of host publication2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009
Pages299-302
Number of pages4
Publication statusPublished - 2009 Dec 1
Event2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 - Genoa, Italy
Duration: 2009 Jul 262009 Jul 30

Publication series

Name2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009

Other

Other2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009
CountryItaly
CityGenoa
Period09-07-2609-07-30

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Electrical and Electronic Engineering

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  • Cite this

    Lee, C., Xiang, W., & Hsiao, F. L. (2009). Computational study of an optical NEMS sensor. In 2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009 (pp. 299-302). [5394635] (2009 9th IEEE Conference on Nanotechnology, IEEE NANO 2009).