Compliant scanning micromirror actuated with a displacement amplification mechanism

Tzung-Ming Chen, Florian Schneider, Ulrike Wallrabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.

Original languageEnglish
Title of host publication2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages127-128
Number of pages2
DOIs
Publication statusPublished - 2010 Dec 1
Event2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan
Duration: 2010 Aug 92010 Aug 12

Other

Other2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
CountryJapan
CitySapporo
Period10-08-0910-08-12

Fingerprint

Optical devices
Amplification
Elasticity
Single crystals
Scanning
Copper
Silicon
Kinetics

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Chen, T-M., Schneider, F., & Wallrabe, U. (2010). Compliant scanning micromirror actuated with a displacement amplification mechanism. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 127-128). [5672150] https://doi.org/10.1109/OMEMS.2010.5672150
Chen, Tzung-Ming ; Schneider, Florian ; Wallrabe, Ulrike. / Compliant scanning micromirror actuated with a displacement amplification mechanism. 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. pp. 127-128
@inproceedings{41cb8ac692674937828d83d1e7cc0331,
title = "Compliant scanning micromirror actuated with a displacement amplification mechanism",
abstract = "We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.",
author = "Tzung-Ming Chen and Florian Schneider and Ulrike Wallrabe",
year = "2010",
month = "12",
day = "1",
doi = "10.1109/OMEMS.2010.5672150",
language = "English",
isbn = "9781424489251",
pages = "127--128",
booktitle = "2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010",

}

Chen, T-M, Schneider, F & Wallrabe, U 2010, Compliant scanning micromirror actuated with a displacement amplification mechanism. in 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010., 5672150, pp. 127-128, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, Sapporo, Japan, 10-08-09. https://doi.org/10.1109/OMEMS.2010.5672150

Compliant scanning micromirror actuated with a displacement amplification mechanism. / Chen, Tzung-Ming; Schneider, Florian; Wallrabe, Ulrike.

2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 127-128 5672150.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Compliant scanning micromirror actuated with a displacement amplification mechanism

AU - Chen, Tzung-Ming

AU - Schneider, Florian

AU - Wallrabe, Ulrike

PY - 2010/12/1

Y1 - 2010/12/1

N2 - We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.

AB - We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.

UR - http://www.scopus.com/inward/record.url?scp=78751478797&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78751478797&partnerID=8YFLogxK

U2 - 10.1109/OMEMS.2010.5672150

DO - 10.1109/OMEMS.2010.5672150

M3 - Conference contribution

AN - SCOPUS:78751478797

SN - 9781424489251

SP - 127

EP - 128

BT - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

ER -

Chen T-M, Schneider F, Wallrabe U. Compliant scanning micromirror actuated with a displacement amplification mechanism. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 127-128. 5672150 https://doi.org/10.1109/OMEMS.2010.5672150