Abstract
In this study, radio frequency (RF) magnetron sputtering was used to investigate the effects of process parameters on the electrical and optical properties of AZO(ZnO:Al) and AgPd multilayer films on type 1737F Corning glass. Experiments were performed using RF power and working pressure as variable parameters. The best transmittance (90%) and lowest resistivity (8.28 ×10-4 Ωcm) were obtained from multilayer films of AZO/AgPd/AZO, in which the AgPd was deposited using RF power of 150 W without substrate heating to thicknesses of AZO(50 nm)/AgPd(5 nm)/AZO(50 nm). An increase in working pressure led to an increase in resistivity and a decrease in transmittance, due to an increase in the number of defects in the AgPd layer, which produced a discontinuous interface between the AgPd and AZO. The relationship between transmittance/resistance and RF power is non-linear. The inner AgPd metal layer largely determines the optical quality and electrical resistivity of AZO/AgPd/AZO multilayer films.
| Original language | English |
|---|---|
| Pages (from-to) | 475-482 |
| Number of pages | 8 |
| Journal | Chinese Journal of Physics |
| Volume | 54 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2016 Jan 1 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
Cite this
}
Characterizing the electrical and optical properties of AZO/AgPd/AZO multilayer film using RF magnetron sputtering. / Lin, Yi-Cheng or Y. C.; Lu, Kun Hsin; Chen, Jhih Jhong.
In: Chinese Journal of Physics, Vol. 54, No. 4, 01.01.2016, p. 475-482.Research output: Contribution to journal › Article
TY - JOUR
T1 - Characterizing the electrical and optical properties of AZO/AgPd/AZO multilayer film using RF magnetron sputtering
AU - Lin, Yi-Cheng or Y. C.
AU - Lu, Kun Hsin
AU - Chen, Jhih Jhong
PY - 2016/1/1
Y1 - 2016/1/1
N2 - In this study, radio frequency (RF) magnetron sputtering was used to investigate the effects of process parameters on the electrical and optical properties of AZO(ZnO:Al) and AgPd multilayer films on type 1737F Corning glass. Experiments were performed using RF power and working pressure as variable parameters. The best transmittance (90%) and lowest resistivity (8.28 ×10-4 Ωcm) were obtained from multilayer films of AZO/AgPd/AZO, in which the AgPd was deposited using RF power of 150 W without substrate heating to thicknesses of AZO(50 nm)/AgPd(5 nm)/AZO(50 nm). An increase in working pressure led to an increase in resistivity and a decrease in transmittance, due to an increase in the number of defects in the AgPd layer, which produced a discontinuous interface between the AgPd and AZO. The relationship between transmittance/resistance and RF power is non-linear. The inner AgPd metal layer largely determines the optical quality and electrical resistivity of AZO/AgPd/AZO multilayer films.
AB - In this study, radio frequency (RF) magnetron sputtering was used to investigate the effects of process parameters on the electrical and optical properties of AZO(ZnO:Al) and AgPd multilayer films on type 1737F Corning glass. Experiments were performed using RF power and working pressure as variable parameters. The best transmittance (90%) and lowest resistivity (8.28 ×10-4 Ωcm) were obtained from multilayer films of AZO/AgPd/AZO, in which the AgPd was deposited using RF power of 150 W without substrate heating to thicknesses of AZO(50 nm)/AgPd(5 nm)/AZO(50 nm). An increase in working pressure led to an increase in resistivity and a decrease in transmittance, due to an increase in the number of defects in the AgPd layer, which produced a discontinuous interface between the AgPd and AZO. The relationship between transmittance/resistance and RF power is non-linear. The inner AgPd metal layer largely determines the optical quality and electrical resistivity of AZO/AgPd/AZO multilayer films.
UR - http://www.scopus.com/inward/record.url?scp=84988520886&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84988520886&partnerID=8YFLogxK
U2 - 10.1016/j.cjph.2016.06.007
DO - 10.1016/j.cjph.2016.06.007
M3 - Article
AN - SCOPUS:84988520886
VL - 54
SP - 475
EP - 482
JO - Chinese Journal of Physics
JF - Chinese Journal of Physics
SN - 0577-9073
IS - 4
ER -